10/14/2011	12:07:05 AM	Run aborted at 12:07 AM
10/14/2011	12:07:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	12:07:11 AM	Recipe started at 12:07 AM
10/14/2011	12:07:11 AM	Helium valve closed
10/14/2011	12:07:11 AM	H2 valve closed
10/14/2011	12:07:11 AM	BCl3 valve closed
10/14/2011	12:07:11 AM	PH3 valve closed
10/14/2011	12:07:11 AM	SiCl4 pre valve closed
10/14/2011	12:07:11 AM	SiCl4 post valve closed
10/14/2011	12:07:11 AM	Main Vac valve closed
10/14/2011	12:07:11 AM	Bubbler valve closed
10/14/2011	12:07:11 AM	Bypass valve opened
10/14/2011	12:07:11 AM	Helium MFC set to  0.000000
10/14/2011	12:07:11 AM	H2 MFC set to  0.000000
10/14/2011	12:07:11 AM	BCl3 MFC set to  0.000000
10/14/2011	12:07:11 AM	PHl3 MFC set to  0.000000
10/14/2011	12:07:11 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:07:11 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	12:07:11 AM	Tube furnace set to 0
10/14/2011	12:07:16 AM	Run aborted at 12:07 AM
10/14/2011	12:07:16 AM	Helium valve closed
10/14/2011	12:07:16 AM	H2 valve closed
10/14/2011	12:07:16 AM	BCl3 valve closed
10/14/2011	12:07:16 AM	PH3 valve closed
10/14/2011	12:07:16 AM	SiCl4 pre valve closed
10/14/2011	12:07:16 AM	SiCl4 post valve closed
10/14/2011	12:07:16 AM	Bypass valve closed
10/14/2011	12:07:16 AM	Main Vac valve closed
10/14/2011	12:07:16 AM	Bubbler valve closed
10/14/2011	12:07:16 AM	Helium MFC set to  0.000000
10/14/2011	12:07:16 AM	H2 MFC set to  0.000000
10/14/2011	12:07:16 AM	BCl3 MFC set to  0.000000
10/14/2011	12:07:16 AM	PHl3 MFC set to  0.000000
10/14/2011	12:07:16 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:07:16 AM	Tube furnace set to 0
10/14/2011	12:07:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	12:07:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	12:07:19 AM	Recipe started at 12:07 AM
10/14/2011	12:07:19 AM	Helium valve closed
10/14/2011	12:07:19 AM	H2 valve closed
10/14/2011	12:07:19 AM	BCl3 valve closed
10/14/2011	12:07:19 AM	PH3 valve closed
10/14/2011	12:07:19 AM	SiCl4 pre valve closed
10/14/2011	12:07:19 AM	SiCl4 post valve closed
10/14/2011	12:07:19 AM	Main Vac valve closed
10/14/2011	12:07:19 AM	Bypass valve closed
10/14/2011	12:07:19 AM	Bubbler valve closed
10/14/2011	12:07:19 AM	Helium MFC set to  0.000000
10/14/2011	12:07:19 AM	H2 MFC set to  0.000000
10/14/2011	12:07:19 AM	BCl3 MFC set to  0.000000
10/14/2011	12:07:19 AM	PHl3 MFC set to  0.000000
10/14/2011	12:07:19 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:07:19 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	12:07:19 AM	Tube furnace set to 0
10/14/2011	12:07:22 AM	H2 valve closed
10/14/2011	12:07:22 AM	BCl3 valve closed
10/14/2011	12:07:22 AM	PH3 valve closed
10/14/2011	12:07:22 AM	SiCl4 pre valve closed
10/14/2011	12:07:22 AM	SiCl4 post valve closed
10/14/2011	12:07:22 AM	Main Vac valve closed
10/14/2011	12:07:22 AM	Bypass valve closed
10/14/2011	12:07:22 AM	Bubbler valve closed
10/14/2011	12:07:22 AM	Helium valve opened
10/14/2011	12:07:22 AM	Helium MFC set to  500.000000
10/14/2011	12:07:22 AM	H2 MFC set to  0.000000
10/14/2011	12:07:22 AM	BCl3 MFC set to  0.000000
10/14/2011	12:07:22 AM	PHl3 MFC set to  0.000000
10/14/2011	12:07:22 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:07:22 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	12:07:23 AM	Tube furnace set to 0
10/14/2011	12:08:11 AM	Helium valve closed
10/14/2011	12:08:11 AM	H2 valve closed
10/14/2011	12:08:11 AM	BCl3 valve closed
10/14/2011	12:08:11 AM	PH3 valve closed
10/14/2011	12:08:11 AM	SiCl4 pre valve closed
10/14/2011	12:08:11 AM	SiCl4 post valve closed
10/14/2011	12:08:11 AM	Main Vac valve closed
10/14/2011	12:08:11 AM	Bypass valve closed
10/14/2011	12:08:11 AM	Bubbler valve closed
10/14/2011	12:08:11 AM	Helium MFC set to  0.000000
10/14/2011	12:08:11 AM	H2 MFC set to  0.000000
10/14/2011	12:08:11 AM	BCl3 MFC set to  0.000000
10/14/2011	12:08:11 AM	PHl3 MFC set to  0.000000
10/14/2011	12:08:11 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:08:11 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	12:08:11 AM	Tube furnace set to 0
10/14/2011	12:08:12 AM	Run finished at 12:08 AM
10/14/2011	12:08:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	12:09:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	12:09:22 AM	Recipe started at 12:09 AM
10/14/2011	12:09:22 AM	Helium valve closed
10/14/2011	12:09:22 AM	H2 valve closed
10/14/2011	12:09:22 AM	BCl3 valve closed
10/14/2011	12:09:22 AM	PH3 valve closed
10/14/2011	12:09:22 AM	SiCl4 pre valve closed
10/14/2011	12:09:22 AM	SiCl4 post valve closed
10/14/2011	12:09:22 AM	Main Vac valve closed
10/14/2011	12:09:22 AM	Bubbler valve closed
10/14/2011	12:09:22 AM	Bypass valve opened
10/14/2011	12:09:22 AM	Helium MFC set to  0.000000
10/14/2011	12:09:22 AM	H2 MFC set to  0.000000
10/14/2011	12:09:22 AM	BCl3 MFC set to  0.000000
10/14/2011	12:09:22 AM	PHl3 MFC set to  0.000000
10/14/2011	12:09:22 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:09:22 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	12:09:22 AM	Tube furnace set to 0
10/14/2011	12:10:12 AM	Helium valve closed
10/14/2011	12:10:12 AM	H2 valve closed
10/14/2011	12:10:12 AM	BCl3 valve closed
10/14/2011	12:10:12 AM	PH3 valve closed
10/14/2011	12:10:12 AM	SiCl4 pre valve closed
10/14/2011	12:10:12 AM	SiCl4 post valve closed
10/14/2011	12:10:12 AM	Main Vac valve closed
10/14/2011	12:10:12 AM	Bubbler valve closed
10/14/2011	12:10:12 AM	Bypass valve opened
10/14/2011	12:10:12 AM	Helium MFC set to  0.000000
10/14/2011	12:10:12 AM	H2 MFC set to  0.000000
10/14/2011	12:10:12 AM	BCl3 MFC set to  0.000000
10/14/2011	12:10:12 AM	PHl3 MFC set to  0.000000
10/14/2011	12:10:12 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:10:12 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	12:10:13 AM	Tube furnace set to 0
10/14/2011	12:11:13 AM	Helium valve closed
10/14/2011	12:11:13 AM	H2 valve closed
10/14/2011	12:11:13 AM	BCl3 valve closed
10/14/2011	12:11:13 AM	PH3 valve closed
10/14/2011	12:11:13 AM	SiCl4 pre valve closed
10/14/2011	12:11:13 AM	SiCl4 post valve closed
10/14/2011	12:11:13 AM	Bypass valve closed
10/14/2011	12:11:13 AM	Bubbler valve closed
10/14/2011	12:11:13 AM	Main Vac valve opened
10/14/2011	12:11:13 AM	Helium MFC set to  0.000000
10/14/2011	12:11:13 AM	H2 MFC set to  0.000000
10/14/2011	12:11:13 AM	BCl3 MFC set to  0.000000
10/14/2011	12:11:13 AM	PHl3 MFC set to  0.000000
10/14/2011	12:11:13 AM	SiCl4 MFC set to  0.000000
10/14/2011	12:11:13 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	12:11:13 AM	Tube furnace set to 0
10/14/2011	12:11:14 AM	Run finished at 12:11 AM
10/14/2011	12:11:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	10:30:38 AM	Main Vac valve closed
10/14/2011	10:30:54 AM	Main Vac valve opened
10/14/2011	10:31:04 AM	Main Vac valve closed
10/14/2011	10:31:31 AM	SiCl4 MFC set to  10.000000
10/14/2011	10:31:33 AM	SiCl4 pre valve opened
10/14/2011	10:31:47 AM	SiCl4 MFC set to  50.000000
10/14/2011	10:31:53 AM	SiCl4 pre valve closed
10/14/2011	10:32:05 AM	Helium MFC set to  500.000000
10/14/2011	10:32:06 AM	Helium valve opened
10/14/2011	10:33:16 AM	Helium valve closed
10/14/2011	10:36:15 AM	SiCl4 post valve opened
10/14/2011	10:36:17 AM	SiCl4 post valve closed
10/14/2011	10:36:25 AM	Bypass valve opened
10/14/2011	10:37:24 AM	Bypass valve closed
10/14/2011	10:37:25 AM	Main Vac valve opened
10/14/2011	10:44:11 AM	Main Vac valve closed
10/14/2011	10:44:23 AM	Main Vac valve opened
10/14/2011	10:44:37 AM	Recipe started at 10:44 AM
10/14/2011	10:44:37 AM	Helium valve closed
10/14/2011	10:44:37 AM	H2 valve closed
10/14/2011	10:44:37 AM	BCl3 valve closed
10/14/2011	10:44:37 AM	PH3 valve closed
10/14/2011	10:44:37 AM	SiCl4 pre valve closed
10/14/2011	10:44:37 AM	SiCl4 post valve closed
10/14/2011	10:44:37 AM	Main Vac valve closed
10/14/2011	10:44:37 AM	Bypass valve closed
10/14/2011	10:44:37 AM	Bubbler valve closed
10/14/2011	10:44:37 AM	Helium MFC set to  0.000000
10/14/2011	10:44:37 AM	H2 MFC set to  0.000000
10/14/2011	10:44:37 AM	BCl3 MFC set to  0.000000
10/14/2011	10:44:37 AM	PHl3 MFC set to  0.000000
10/14/2011	10:44:37 AM	SiCl4 MFC set to  0.000000
10/14/2011	10:44:37 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:44:37 AM	Tube furnace set to 0
10/14/2011	10:44:40 AM	Helium valve closed
10/14/2011	10:44:40 AM	BCl3 valve closed
10/14/2011	10:44:40 AM	PH3 valve closed
10/14/2011	10:44:40 AM	SiCl4 pre valve closed
10/14/2011	10:44:40 AM	SiCl4 post valve closed
10/14/2011	10:44:40 AM	Main Vac valve closed
10/14/2011	10:44:40 AM	Bypass valve closed
10/14/2011	10:44:40 AM	Bubbler valve closed
10/14/2011	10:44:40 AM	H2 valve opened
10/14/2011	10:44:40 AM	Helium MFC set to  0.000000
10/14/2011	10:44:40 AM	H2 MFC set to  500.000000
10/14/2011	10:44:40 AM	BCl3 MFC set to  0.000000
10/14/2011	10:44:40 AM	PHl3 MFC set to  0.000000
10/14/2011	10:44:40 AM	SiCl4 MFC set to  0.000000
10/14/2011	10:44:40 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:44:40 AM	Tube furnace set to 0
10/14/2011	10:45:49 AM	Helium valve closed
10/14/2011	10:45:49 AM	BCl3 valve closed
10/14/2011	10:45:49 AM	PH3 valve closed
10/14/2011	10:45:49 AM	SiCl4 pre valve closed
10/14/2011	10:45:49 AM	SiCl4 post valve closed
10/14/2011	10:45:49 AM	Main Vac valve closed
10/14/2011	10:45:49 AM	Bypass valve closed
10/14/2011	10:45:49 AM	H2 valve opened
10/14/2011	10:45:49 AM	Bubbler valve opened
10/14/2011	10:45:49 AM	Helium MFC set to  0.000000
10/14/2011	10:45:49 AM	H2 MFC set to  500.000000
10/14/2011	10:45:49 AM	BCl3 MFC set to  0.000000
10/14/2011	10:45:49 AM	PHl3 MFC set to  0.000000
10/14/2011	10:45:49 AM	SiCl4 MFC set to  0.000000
10/14/2011	10:45:49 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:45:49 AM	Tube furnace set to 0
10/14/2011	10:45:50 AM	Helium valve closed
10/14/2011	10:45:50 AM	BCl3 valve closed
10/14/2011	10:45:50 AM	PH3 valve closed
10/14/2011	10:45:50 AM	SiCl4 pre valve closed
10/14/2011	10:45:50 AM	SiCl4 post valve closed
10/14/2011	10:45:50 AM	Main Vac valve closed
10/14/2011	10:45:50 AM	Bypass valve closed
10/14/2011	10:45:50 AM	H2 valve opened
10/14/2011	10:45:50 AM	Bubbler valve opened
10/14/2011	10:45:50 AM	Helium MFC set to  0.000000
10/14/2011	10:45:50 AM	H2 MFC set to  500.000000
10/14/2011	10:45:50 AM	BCl3 MFC set to  0.000000
10/14/2011	10:45:50 AM	PHl3 MFC set to  0.000000
10/14/2011	10:45:50 AM	SiCl4 MFC set to  0.000000
10/14/2011	10:45:50 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:45:50 AM	Tube furnace set to 1000
10/14/2011	11:05:50 AM	Helium valve closed
10/14/2011	11:05:50 AM	BCl3 valve closed
10/14/2011	11:05:50 AM	PH3 valve closed
10/14/2011	11:05:50 AM	Main Vac valve closed
10/14/2011	11:05:50 AM	Bypass valve closed
10/14/2011	11:05:50 AM	H2 valve opened
10/14/2011	11:05:50 AM	SiCl4 pre valve opened
10/14/2011	11:05:50 AM	SiCl4 post valve opened
10/14/2011	11:05:50 AM	Bubbler valve opened
10/14/2011	11:05:50 AM	Helium MFC set to  0.000000
10/14/2011	11:05:50 AM	H2 MFC set to  500.000000
10/14/2011	11:05:50 AM	BCl3 MFC set to  0.000000
10/14/2011	11:05:50 AM	PHl3 MFC set to  0.000000
10/14/2011	11:05:50 AM	SiCl4 MFC set to  50.000000
10/14/2011	11:05:50 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:05:50 AM	Tube furnace set to 1000
10/14/2011	11:19:50 AM	Helium valve closed
10/14/2011	11:19:50 AM	BCl3 valve closed
10/14/2011	11:19:50 AM	PH3 valve closed
10/14/2011	11:19:50 AM	SiCl4 pre valve closed
10/14/2011	11:19:50 AM	SiCl4 post valve closed
10/14/2011	11:19:50 AM	Main Vac valve closed
10/14/2011	11:19:50 AM	Bypass valve closed
10/14/2011	11:19:50 AM	H2 valve opened
10/14/2011	11:19:50 AM	Bubbler valve opened
10/14/2011	11:19:50 AM	Helium MFC set to  0.000000
10/14/2011	11:19:50 AM	H2 MFC set to  500.000000
10/14/2011	11:19:50 AM	BCl3 MFC set to  0.000000
10/14/2011	11:19:50 AM	PHl3 MFC set to  0.000000
10/14/2011	11:19:50 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:19:51 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:19:51 AM	Tube furnace set to 750
10/14/2011	11:24:51 AM	H2 valve closed
10/14/2011	11:24:51 AM	BCl3 valve closed
10/14/2011	11:24:51 AM	PH3 valve closed
10/14/2011	11:24:51 AM	SiCl4 pre valve closed
10/14/2011	11:24:51 AM	SiCl4 post valve closed
10/14/2011	11:24:51 AM	Main Vac valve closed
10/14/2011	11:24:51 AM	Bypass valve closed
10/14/2011	11:24:51 AM	Helium valve opened
10/14/2011	11:24:51 AM	Bubbler valve opened
10/14/2011	11:24:51 AM	Helium MFC set to  500.000000
10/14/2011	11:24:51 AM	H2 MFC set to  0.000000
10/14/2011	11:24:51 AM	BCl3 MFC set to  0.000000
10/14/2011	11:24:51 AM	PHl3 MFC set to  0.000000
10/14/2011	11:24:51 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:24:51 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:24:51 AM	Tube furnace set to 0
10/14/2011	11:44:51 AM	Helium valve closed
10/14/2011	11:44:51 AM	H2 valve closed
10/14/2011	11:44:51 AM	BCl3 valve closed
10/14/2011	11:44:51 AM	PH3 valve closed
10/14/2011	11:44:51 AM	SiCl4 pre valve closed
10/14/2011	11:44:51 AM	SiCl4 post valve closed
10/14/2011	11:44:51 AM	Main Vac valve closed
10/14/2011	11:44:51 AM	Bypass valve closed
10/14/2011	11:44:51 AM	Bubbler valve closed
10/14/2011	11:44:51 AM	Helium MFC set to  0.000000
10/14/2011	11:44:51 AM	H2 MFC set to  0.000000
10/14/2011	11:44:51 AM	BCl3 MFC set to  0.000000
10/14/2011	11:44:51 AM	PHl3 MFC set to  0.000000
10/14/2011	11:44:51 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:44:51 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:44:51 AM	Tube furnace set to 0
10/14/2011	11:46:55 AM	Run aborted at 11:46 AM
10/14/2011	11:46:55 AM	Helium valve closed
10/14/2011	11:46:55 AM	H2 valve closed
10/14/2011	11:46:55 AM	BCl3 valve closed
10/14/2011	11:46:55 AM	PH3 valve closed
10/14/2011	11:46:55 AM	SiCl4 pre valve closed
10/14/2011	11:46:55 AM	SiCl4 post valve closed
10/14/2011	11:46:55 AM	Bypass valve closed
10/14/2011	11:46:55 AM	Main Vac valve closed
10/14/2011	11:46:55 AM	Bubbler valve closed
10/14/2011	11:46:55 AM	Helium MFC set to  0.000000
10/14/2011	11:46:55 AM	H2 MFC set to  0.000000
10/14/2011	11:46:55 AM	BCl3 MFC set to  0.000000
10/14/2011	11:46:55 AM	PHl3 MFC set to  0.000000
10/14/2011	11:46:55 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:46:55 AM	Tube furnace set to 0
10/14/2011	11:46:57 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	11:46:58 AM	Recipe started at 11:46 AM
10/14/2011	11:46:58 AM	Helium valve closed
10/14/2011	11:46:58 AM	H2 valve closed
10/14/2011	11:46:58 AM	BCl3 valve closed
10/14/2011	11:46:58 AM	PH3 valve closed
10/14/2011	11:46:58 AM	SiCl4 pre valve closed
10/14/2011	11:46:58 AM	SiCl4 post valve closed
10/14/2011	11:46:58 AM	Main Vac valve closed
10/14/2011	11:46:58 AM	Bypass valve closed
10/14/2011	11:46:58 AM	Bubbler valve closed
10/14/2011	11:46:58 AM	Helium MFC set to  0.000000
10/14/2011	11:46:58 AM	H2 MFC set to  0.000000
10/14/2011	11:46:58 AM	BCl3 MFC set to  0.000000
10/14/2011	11:46:58 AM	PHl3 MFC set to  0.000000
10/14/2011	11:46:58 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:46:58 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:46:58 AM	Tube furnace set to 0
10/14/2011	11:47:01 AM	H2 valve closed
10/14/2011	11:47:01 AM	BCl3 valve closed
10/14/2011	11:47:02 AM	PH3 valve closed
10/14/2011	11:47:02 AM	SiCl4 pre valve closed
10/14/2011	11:47:02 AM	SiCl4 post valve closed
10/14/2011	11:47:02 AM	Main Vac valve closed
10/14/2011	11:47:02 AM	Bypass valve closed
10/14/2011	11:47:02 AM	Bubbler valve closed
10/14/2011	11:47:02 AM	Helium valve opened
10/14/2011	11:47:02 AM	Helium MFC set to  500.000000
10/14/2011	11:47:02 AM	H2 MFC set to  0.000000
10/14/2011	11:47:02 AM	BCl3 MFC set to  0.000000
10/14/2011	11:47:02 AM	PHl3 MFC set to  0.000000
10/14/2011	11:47:02 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:47:02 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:47:02 AM	Tube furnace set to 0
10/14/2011	11:47:02 AM	Helium valve closed
10/14/2011	11:47:02 AM	H2 valve closed
10/14/2011	11:47:02 AM	BCl3 valve closed
10/14/2011	11:47:02 AM	PH3 valve closed
10/14/2011	11:47:02 AM	SiCl4 pre valve closed
10/14/2011	11:47:02 AM	SiCl4 post valve closed
10/14/2011	11:47:02 AM	Main Vac valve closed
10/14/2011	11:47:02 AM	Bypass valve closed
10/14/2011	11:47:02 AM	Bubbler valve closed
10/14/2011	11:47:02 AM	Helium MFC set to  0.000000
10/14/2011	11:47:02 AM	H2 MFC set to  0.000000
10/14/2011	11:47:02 AM	BCl3 MFC set to  0.000000
10/14/2011	11:47:02 AM	PHl3 MFC set to  0.000000
10/14/2011	11:47:02 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:47:02 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:47:02 AM	Tube furnace set to 0
10/14/2011	11:47:03 AM	Run finished at 11:47 AM
10/14/2011	11:47:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	11:53:15 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	11:53:16 AM	Recipe started at 11:53 AM
10/14/2011	11:53:16 AM	Helium valve closed
10/14/2011	11:53:16 AM	H2 valve closed
10/14/2011	11:53:16 AM	BCl3 valve closed
10/14/2011	11:53:16 AM	PH3 valve closed
10/14/2011	11:53:16 AM	SiCl4 pre valve closed
10/14/2011	11:53:16 AM	SiCl4 post valve closed
10/14/2011	11:53:16 AM	Main Vac valve closed
10/14/2011	11:53:16 AM	Bubbler valve closed
10/14/2011	11:53:16 AM	Bypass valve opened
10/14/2011	11:53:16 AM	Helium MFC set to  0.000000
10/14/2011	11:53:16 AM	H2 MFC set to  0.000000
10/14/2011	11:53:16 AM	BCl3 MFC set to  0.000000
10/14/2011	11:53:16 AM	PHl3 MFC set to  0.000000
10/14/2011	11:53:16 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:53:16 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:53:16 AM	Tube furnace set to 0
10/14/2011	11:54:26 AM	Helium valve closed
10/14/2011	11:54:26 AM	H2 valve closed
10/14/2011	11:54:26 AM	BCl3 valve closed
10/14/2011	11:54:26 AM	PH3 valve closed
10/14/2011	11:54:26 AM	SiCl4 pre valve closed
10/14/2011	11:54:26 AM	SiCl4 post valve closed
10/14/2011	11:54:26 AM	Main Vac valve closed
10/14/2011	11:54:26 AM	Bubbler valve closed
10/14/2011	11:54:26 AM	Bypass valve opened
10/14/2011	11:54:26 AM	Helium MFC set to  0.000000
10/14/2011	11:54:26 AM	H2 MFC set to  0.000000
10/14/2011	11:54:26 AM	BCl3 MFC set to  0.000000
10/14/2011	11:54:26 AM	PHl3 MFC set to  0.000000
10/14/2011	11:54:26 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:54:26 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:54:26 AM	Tube furnace set to 0
10/14/2011	11:55:26 AM	Helium valve closed
10/14/2011	11:55:26 AM	H2 valve closed
10/14/2011	11:55:26 AM	BCl3 valve closed
10/14/2011	11:55:26 AM	PH3 valve closed
10/14/2011	11:55:26 AM	SiCl4 pre valve closed
10/14/2011	11:55:26 AM	SiCl4 post valve closed
10/14/2011	11:55:26 AM	Bypass valve closed
10/14/2011	11:55:26 AM	Bubbler valve closed
10/14/2011	11:55:26 AM	Main Vac valve opened
10/14/2011	11:55:26 AM	Helium MFC set to  0.000000
10/14/2011	11:55:26 AM	H2 MFC set to  0.000000
10/14/2011	11:55:26 AM	BCl3 MFC set to  0.000000
10/14/2011	11:55:26 AM	PHl3 MFC set to  0.000000
10/14/2011	11:55:26 AM	SiCl4 MFC set to  0.000000
10/14/2011	11:55:26 AM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:55:27 AM	Tube furnace set to 0
10/14/2011	11:55:28 AM	Run finished at 11:55 AM
10/14/2011	11:55:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	12:36:19 PM	Main Vac valve closed
10/14/2011	12:36:28 PM	Main Vac valve opened
10/14/2011	12:56:19 PM	Main Vac valve closed
10/14/2011	12:56:29 PM	Main Vac valve opened
10/14/2011	12:56:33 PM	Main Vac valve closed
10/14/2011	12:56:35 PM	Helium valve opened
10/14/2011	12:56:37 PM	Helium MFC set to  500.000000
10/14/2011	12:57:42 PM	Helium valve closed
10/14/2011	12:57:43 PM	Bypass valve opened
10/14/2011	12:58:54 PM	Bypass valve closed
10/14/2011	12:58:54 PM	Main Vac valve opened
10/14/2011	1:29:44 PM	Main Vac valve closed
10/14/2011	1:29:57 PM	Main Vac valve opened
10/14/2011	1:30:15 PM	Recipe started at 1:30 PM
10/14/2011	1:30:15 PM	Helium valve closed
10/14/2011	1:30:15 PM	H2 valve closed
10/14/2011	1:30:15 PM	BCl3 valve closed
10/14/2011	1:30:15 PM	PH3 valve closed
10/14/2011	1:30:15 PM	SiCl4 pre valve closed
10/14/2011	1:30:15 PM	SiCl4 post valve closed
10/14/2011	1:30:15 PM	Main Vac valve closed
10/14/2011	1:30:15 PM	Bypass valve closed
10/14/2011	1:30:15 PM	Bubbler valve closed
10/14/2011	1:30:15 PM	Helium MFC set to  0.000000
10/14/2011	1:30:15 PM	H2 MFC set to  0.000000
10/14/2011	1:30:15 PM	BCl3 MFC set to  0.000000
10/14/2011	1:30:15 PM	PHl3 MFC set to  0.000000
10/14/2011	1:30:15 PM	SiCl4 MFC set to  0.000000
10/14/2011	1:30:15 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	1:30:15 PM	Tube furnace set to 0
10/14/2011	1:30:18 PM	Helium valve closed
10/14/2011	1:30:18 PM	BCl3 valve closed
10/14/2011	1:30:18 PM	PH3 valve closed
10/14/2011	1:30:18 PM	SiCl4 pre valve closed
10/14/2011	1:30:18 PM	SiCl4 post valve closed
10/14/2011	1:30:18 PM	Main Vac valve closed
10/14/2011	1:30:18 PM	Bypass valve closed
10/14/2011	1:30:18 PM	Bubbler valve closed
10/14/2011	1:30:18 PM	H2 valve opened
10/14/2011	1:30:18 PM	Helium MFC set to  0.000000
10/14/2011	1:30:18 PM	H2 MFC set to  500.000000
10/14/2011	1:30:18 PM	BCl3 MFC set to  0.000000
10/14/2011	1:30:18 PM	PHl3 MFC set to  0.000000
10/14/2011	1:30:18 PM	SiCl4 MFC set to  0.000000
10/14/2011	1:30:18 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	1:30:18 PM	Tube furnace set to 0
10/14/2011	1:31:24 PM	Helium valve closed
10/14/2011	1:31:24 PM	BCl3 valve closed
10/14/2011	1:31:24 PM	PH3 valve closed
10/14/2011	1:31:24 PM	SiCl4 pre valve closed
10/14/2011	1:31:24 PM	SiCl4 post valve closed
10/14/2011	1:31:24 PM	Main Vac valve closed
10/14/2011	1:31:24 PM	Bypass valve closed
10/14/2011	1:31:24 PM	H2 valve opened
10/14/2011	1:31:24 PM	Bubbler valve opened
10/14/2011	1:31:24 PM	Helium MFC set to  0.000000
10/14/2011	1:31:24 PM	H2 MFC set to  500.000000
10/14/2011	1:31:24 PM	BCl3 MFC set to  0.000000
10/14/2011	1:31:24 PM	PHl3 MFC set to  0.000000
10/14/2011	1:31:24 PM	SiCl4 MFC set to  0.000000
10/14/2011	1:31:24 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	1:31:24 PM	Tube furnace set to 0
10/14/2011	1:31:25 PM	Helium valve closed
10/14/2011	1:31:25 PM	BCl3 valve closed
10/14/2011	1:31:25 PM	PH3 valve closed
10/14/2011	1:31:25 PM	SiCl4 pre valve closed
10/14/2011	1:31:25 PM	SiCl4 post valve closed
10/14/2011	1:31:25 PM	Main Vac valve closed
10/14/2011	1:31:25 PM	Bypass valve closed
10/14/2011	1:31:25 PM	H2 valve opened
10/14/2011	1:31:25 PM	Bubbler valve opened
10/14/2011	1:31:25 PM	Helium MFC set to  0.000000
10/14/2011	1:31:25 PM	H2 MFC set to  500.000000
10/14/2011	1:31:25 PM	BCl3 MFC set to  0.000000
10/14/2011	1:31:25 PM	PHl3 MFC set to  0.000000
10/14/2011	1:31:25 PM	SiCl4 MFC set to  0.000000
10/14/2011	1:31:25 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	1:31:25 PM	Tube furnace set to 1000
10/14/2011	1:51:25 PM	Helium valve closed
10/14/2011	1:51:25 PM	BCl3 valve closed
10/14/2011	1:51:25 PM	PH3 valve closed
10/14/2011	1:51:25 PM	Main Vac valve closed
10/14/2011	1:51:25 PM	Bypass valve closed
10/14/2011	1:51:25 PM	H2 valve opened
10/14/2011	1:51:25 PM	SiCl4 pre valve opened
10/14/2011	1:51:25 PM	SiCl4 post valve opened
10/14/2011	1:51:25 PM	Bubbler valve opened
10/14/2011	1:51:25 PM	Helium MFC set to  0.000000
10/14/2011	1:51:25 PM	H2 MFC set to  500.000000
10/14/2011	1:51:25 PM	BCl3 MFC set to  0.000000
10/14/2011	1:51:25 PM	PHl3 MFC set to  0.000000
10/14/2011	1:51:25 PM	SiCl4 MFC set to  50.000000
10/14/2011	1:51:25 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	1:51:25 PM	Tube furnace set to 1000
10/14/2011	2:05:25 PM	Helium valve closed
10/14/2011	2:05:25 PM	BCl3 valve closed
10/14/2011	2:05:25 PM	PH3 valve closed
10/14/2011	2:05:25 PM	SiCl4 pre valve closed
10/14/2011	2:05:25 PM	SiCl4 post valve closed
10/14/2011	2:05:25 PM	Main Vac valve closed
10/14/2011	2:05:25 PM	Bypass valve closed
10/14/2011	2:05:25 PM	H2 valve opened
10/14/2011	2:05:25 PM	Bubbler valve opened
10/14/2011	2:05:25 PM	Helium MFC set to  0.000000
10/14/2011	2:05:25 PM	H2 MFC set to  500.000000
10/14/2011	2:05:25 PM	BCl3 MFC set to  0.000000
10/14/2011	2:05:25 PM	PHl3 MFC set to  0.000000
10/14/2011	2:05:25 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:05:25 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:05:25 PM	Tube furnace set to 750
10/14/2011	2:10:25 PM	H2 valve closed
10/14/2011	2:10:25 PM	BCl3 valve closed
10/14/2011	2:10:25 PM	PH3 valve closed
10/14/2011	2:10:25 PM	SiCl4 pre valve closed
10/14/2011	2:10:25 PM	SiCl4 post valve closed
10/14/2011	2:10:25 PM	Main Vac valve closed
10/14/2011	2:10:25 PM	Bypass valve closed
10/14/2011	2:10:25 PM	Helium valve opened
10/14/2011	2:10:25 PM	Bubbler valve opened
10/14/2011	2:10:25 PM	Helium MFC set to  500.000000
10/14/2011	2:10:25 PM	H2 MFC set to  0.000000
10/14/2011	2:10:25 PM	BCl3 MFC set to  0.000000
10/14/2011	2:10:25 PM	PHl3 MFC set to  0.000000
10/14/2011	2:10:25 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:10:25 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:10:26 PM	Tube furnace set to 0
10/14/2011	2:30:26 PM	Helium valve closed
10/14/2011	2:30:26 PM	H2 valve closed
10/14/2011	2:30:26 PM	BCl3 valve closed
10/14/2011	2:30:26 PM	PH3 valve closed
10/14/2011	2:30:26 PM	SiCl4 pre valve closed
10/14/2011	2:30:26 PM	SiCl4 post valve closed
10/14/2011	2:30:26 PM	Main Vac valve closed
10/14/2011	2:30:26 PM	Bypass valve closed
10/14/2011	2:30:26 PM	Bubbler valve closed
10/14/2011	2:30:26 PM	Helium MFC set to  0.000000
10/14/2011	2:30:26 PM	H2 MFC set to  0.000000
10/14/2011	2:30:26 PM	BCl3 MFC set to  0.000000
10/14/2011	2:30:26 PM	PHl3 MFC set to  0.000000
10/14/2011	2:30:26 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:30:26 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:30:26 PM	Tube furnace set to 0
10/14/2011	2:43:07 PM	Run aborted at 2:43 PM
10/14/2011	2:43:07 PM	Helium valve closed
10/14/2011	2:43:07 PM	H2 valve closed
10/14/2011	2:43:07 PM	BCl3 valve closed
10/14/2011	2:43:07 PM	PH3 valve closed
10/14/2011	2:43:07 PM	SiCl4 pre valve closed
10/14/2011	2:43:07 PM	SiCl4 post valve closed
10/14/2011	2:43:07 PM	Bypass valve closed
10/14/2011	2:43:07 PM	Main Vac valve closed
10/14/2011	2:43:07 PM	Bubbler valve closed
10/14/2011	2:43:07 PM	Helium MFC set to  0.000000
10/14/2011	2:43:07 PM	H2 MFC set to  0.000000
10/14/2011	2:43:07 PM	BCl3 MFC set to  0.000000
10/14/2011	2:43:07 PM	PHl3 MFC set to  0.000000
10/14/2011	2:43:07 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:43:07 PM	Tube furnace set to 0
10/14/2011	2:43:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	2:43:19 PM	Recipe started at 2:43 PM
10/14/2011	2:43:19 PM	Helium valve closed
10/14/2011	2:43:19 PM	H2 valve closed
10/14/2011	2:43:19 PM	BCl3 valve closed
10/14/2011	2:43:19 PM	PH3 valve closed
10/14/2011	2:43:19 PM	SiCl4 pre valve closed
10/14/2011	2:43:19 PM	SiCl4 post valve closed
10/14/2011	2:43:19 PM	Main Vac valve closed
10/14/2011	2:43:19 PM	Bypass valve closed
10/14/2011	2:43:19 PM	Bubbler valve closed
10/14/2011	2:43:19 PM	Helium MFC set to  0.000000
10/14/2011	2:43:19 PM	H2 MFC set to  0.000000
10/14/2011	2:43:19 PM	BCl3 MFC set to  0.000000
10/14/2011	2:43:19 PM	PHl3 MFC set to  0.000000
10/14/2011	2:43:19 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:43:19 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:43:19 PM	Tube furnace set to 0
10/14/2011	2:43:22 PM	H2 valve closed
10/14/2011	2:43:22 PM	BCl3 valve closed
10/14/2011	2:43:22 PM	PH3 valve closed
10/14/2011	2:43:22 PM	SiCl4 pre valve closed
10/14/2011	2:43:22 PM	SiCl4 post valve closed
10/14/2011	2:43:22 PM	Main Vac valve closed
10/14/2011	2:43:22 PM	Bypass valve closed
10/14/2011	2:43:22 PM	Bubbler valve closed
10/14/2011	2:43:23 PM	Helium valve opened
10/14/2011	2:43:23 PM	Helium MFC set to  500.000000
10/14/2011	2:43:23 PM	H2 MFC set to  0.000000
10/14/2011	2:43:23 PM	BCl3 MFC set to  0.000000
10/14/2011	2:43:23 PM	PHl3 MFC set to  0.000000
10/14/2011	2:43:23 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:43:23 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:43:23 PM	Tube furnace set to 0
10/14/2011	2:43:27 PM	Helium valve closed
10/14/2011	2:43:27 PM	H2 valve closed
10/14/2011	2:43:27 PM	BCl3 valve closed
10/14/2011	2:43:27 PM	PH3 valve closed
10/14/2011	2:43:27 PM	SiCl4 pre valve closed
10/14/2011	2:43:27 PM	SiCl4 post valve closed
10/14/2011	2:43:27 PM	Main Vac valve closed
10/14/2011	2:43:27 PM	Bypass valve closed
10/14/2011	2:43:27 PM	Bubbler valve closed
10/14/2011	2:43:27 PM	Helium MFC set to  0.000000
10/14/2011	2:43:27 PM	H2 MFC set to  0.000000
10/14/2011	2:43:27 PM	BCl3 MFC set to  0.000000
10/14/2011	2:43:27 PM	PHl3 MFC set to  0.000000
10/14/2011	2:43:27 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:43:27 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:43:27 PM	Tube furnace set to 0
10/14/2011	2:43:28 PM	Run finished at 2:43 PM
10/14/2011	2:43:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	2:47:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	2:47:29 PM	Recipe started at 2:47 PM
10/14/2011	2:47:29 PM	Helium valve closed
10/14/2011	2:47:29 PM	H2 valve closed
10/14/2011	2:47:29 PM	BCl3 valve closed
10/14/2011	2:47:29 PM	PH3 valve closed
10/14/2011	2:47:29 PM	SiCl4 pre valve closed
10/14/2011	2:47:29 PM	SiCl4 post valve closed
10/14/2011	2:47:29 PM	Main Vac valve closed
10/14/2011	2:47:29 PM	Bubbler valve closed
10/14/2011	2:47:29 PM	Bypass valve opened
10/14/2011	2:47:29 PM	Helium MFC set to  0.000000
10/14/2011	2:47:29 PM	H2 MFC set to  0.000000
10/14/2011	2:47:29 PM	BCl3 MFC set to  0.000000
10/14/2011	2:47:29 PM	PHl3 MFC set to  0.000000
10/14/2011	2:47:29 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:47:29 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:47:29 PM	Tube furnace set to 0
10/14/2011	2:48:36 PM	Helium valve closed
10/14/2011	2:48:36 PM	H2 valve closed
10/14/2011	2:48:36 PM	BCl3 valve closed
10/14/2011	2:48:36 PM	PH3 valve closed
10/14/2011	2:48:36 PM	SiCl4 pre valve closed
10/14/2011	2:48:36 PM	SiCl4 post valve closed
10/14/2011	2:48:36 PM	Main Vac valve closed
10/14/2011	2:48:36 PM	Bubbler valve closed
10/14/2011	2:48:36 PM	Bypass valve opened
10/14/2011	2:48:36 PM	Helium MFC set to  0.000000
10/14/2011	2:48:36 PM	H2 MFC set to  0.000000
10/14/2011	2:48:36 PM	BCl3 MFC set to  0.000000
10/14/2011	2:48:36 PM	PHl3 MFC set to  0.000000
10/14/2011	2:48:36 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:48:36 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:48:36 PM	Tube furnace set to 0
10/14/2011	2:49:36 PM	Helium valve closed
10/14/2011	2:49:36 PM	H2 valve closed
10/14/2011	2:49:36 PM	BCl3 valve closed
10/14/2011	2:49:36 PM	PH3 valve closed
10/14/2011	2:49:36 PM	SiCl4 pre valve closed
10/14/2011	2:49:36 PM	SiCl4 post valve closed
10/14/2011	2:49:36 PM	Bypass valve closed
10/14/2011	2:49:36 PM	Bubbler valve closed
10/14/2011	2:49:36 PM	Main Vac valve opened
10/14/2011	2:49:36 PM	Helium MFC set to  0.000000
10/14/2011	2:49:36 PM	H2 MFC set to  0.000000
10/14/2011	2:49:36 PM	BCl3 MFC set to  0.000000
10/14/2011	2:49:36 PM	PHl3 MFC set to  0.000000
10/14/2011	2:49:36 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:49:36 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:49:36 PM	Tube furnace set to 0
10/14/2011	2:49:37 PM	Run finished at 2:49 PM
10/14/2011	2:49:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	2:52:09 PM	Helium MFC set to  500.000000
10/14/2011	2:52:11 PM	Main Vac valve closed
10/14/2011	2:52:13 PM	Helium valve opened
10/14/2011	2:53:17 PM	Helium valve closed
10/14/2011	2:53:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	2:53:22 PM	Recipe started at 2:53 PM
10/14/2011	2:53:22 PM	Helium valve closed
10/14/2011	2:53:22 PM	H2 valve closed
10/14/2011	2:53:22 PM	BCl3 valve closed
10/14/2011	2:53:22 PM	PH3 valve closed
10/14/2011	2:53:22 PM	SiCl4 pre valve closed
10/14/2011	2:53:22 PM	SiCl4 post valve closed
10/14/2011	2:53:22 PM	Main Vac valve closed
10/14/2011	2:53:22 PM	Bubbler valve closed
10/14/2011	2:53:22 PM	Bypass valve opened
10/14/2011	2:53:22 PM	Helium MFC set to  0.000000
10/14/2011	2:53:22 PM	H2 MFC set to  0.000000
10/14/2011	2:53:22 PM	BCl3 MFC set to  0.000000
10/14/2011	2:53:22 PM	PHl3 MFC set to  0.000000
10/14/2011	2:53:22 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:53:22 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:53:22 PM	Tube furnace set to 0
10/14/2011	2:54:19 PM	Helium valve closed
10/14/2011	2:54:19 PM	H2 valve closed
10/14/2011	2:54:19 PM	BCl3 valve closed
10/14/2011	2:54:19 PM	PH3 valve closed
10/14/2011	2:54:19 PM	SiCl4 pre valve closed
10/14/2011	2:54:19 PM	SiCl4 post valve closed
10/14/2011	2:54:19 PM	Main Vac valve closed
10/14/2011	2:54:19 PM	Bubbler valve closed
10/14/2011	2:54:19 PM	Bypass valve opened
10/14/2011	2:54:19 PM	Helium MFC set to  0.000000
10/14/2011	2:54:19 PM	H2 MFC set to  0.000000
10/14/2011	2:54:19 PM	BCl3 MFC set to  0.000000
10/14/2011	2:54:19 PM	PHl3 MFC set to  0.000000
10/14/2011	2:54:19 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:54:19 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:54:19 PM	Tube furnace set to 0
10/14/2011	2:55:19 PM	Helium valve closed
10/14/2011	2:55:19 PM	H2 valve closed
10/14/2011	2:55:19 PM	BCl3 valve closed
10/14/2011	2:55:19 PM	PH3 valve closed
10/14/2011	2:55:19 PM	SiCl4 pre valve closed
10/14/2011	2:55:19 PM	SiCl4 post valve closed
10/14/2011	2:55:19 PM	Bypass valve closed
10/14/2011	2:55:19 PM	Bubbler valve closed
10/14/2011	2:55:19 PM	Main Vac valve opened
10/14/2011	2:55:19 PM	Helium MFC set to  0.000000
10/14/2011	2:55:19 PM	H2 MFC set to  0.000000
10/14/2011	2:55:19 PM	BCl3 MFC set to  0.000000
10/14/2011	2:55:19 PM	PHl3 MFC set to  0.000000
10/14/2011	2:55:19 PM	SiCl4 MFC set to  0.000000
10/14/2011	2:55:19 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	2:55:20 PM	Tube furnace set to 0
10/14/2011	2:55:21 PM	Run finished at 2:55 PM
10/14/2011	2:55:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	2:59:46 PM	Main Vac valve closed
10/14/2011	2:59:57 PM	Main Vac valve opened
10/14/2011	3:00:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/14/2011	3:00:14 PM	Recipe started at 3:00 PM
10/14/2011	3:00:14 PM	Helium valve closed
10/14/2011	3:00:14 PM	H2 valve closed
10/14/2011	3:00:14 PM	BCl3 valve closed
10/14/2011	3:00:14 PM	PH3 valve closed
10/14/2011	3:00:14 PM	SiCl4 pre valve closed
10/14/2011	3:00:14 PM	SiCl4 post valve closed
10/14/2011	3:00:14 PM	Main Vac valve closed
10/14/2011	3:00:14 PM	Bubbler valve closed
10/14/2011	3:00:14 PM	Bypass valve opened
10/14/2011	3:00:14 PM	Helium MFC set to  0.000000
10/14/2011	3:00:14 PM	H2 MFC set to  0.000000
10/14/2011	3:00:14 PM	BCl3 MFC set to  0.000000
10/14/2011	3:00:14 PM	PHl3 MFC set to  0.000000
10/14/2011	3:00:14 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:00:14 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:00:14 PM	Tube furnace set to 0
10/14/2011	3:00:15 PM	Helium valve closed
10/14/2011	3:00:15 PM	H2 valve closed
10/14/2011	3:00:15 PM	BCl3 valve closed
10/14/2011	3:00:15 PM	PH3 valve closed
10/14/2011	3:00:15 PM	SiCl4 pre valve closed
10/14/2011	3:00:15 PM	SiCl4 post valve closed
10/14/2011	3:00:15 PM	Main Vac valve closed
10/14/2011	3:00:15 PM	Bubbler valve closed
10/14/2011	3:00:15 PM	Bypass valve opened
10/14/2011	3:00:15 PM	Helium MFC set to  0.000000
10/14/2011	3:00:15 PM	H2 MFC set to  0.000000
10/14/2011	3:00:15 PM	BCl3 MFC set to  0.000000
10/14/2011	3:00:15 PM	PHl3 MFC set to  0.000000
10/14/2011	3:00:15 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:00:15 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:00:15 PM	Tube furnace set to 0
10/14/2011	3:00:16 PM	Helium valve closed
10/14/2011	3:00:16 PM	H2 valve closed
10/14/2011	3:00:16 PM	BCl3 valve closed
10/14/2011	3:00:16 PM	PH3 valve closed
10/14/2011	3:00:16 PM	SiCl4 pre valve closed
10/14/2011	3:00:16 PM	SiCl4 post valve closed
10/14/2011	3:00:16 PM	Bypass valve closed
10/14/2011	3:00:16 PM	Bubbler valve closed
10/14/2011	3:00:16 PM	Main Vac valve opened
10/14/2011	3:00:16 PM	Helium MFC set to  0.000000
10/14/2011	3:00:16 PM	H2 MFC set to  0.000000
10/14/2011	3:00:16 PM	BCl3 MFC set to  0.000000
10/14/2011	3:00:16 PM	PHl3 MFC set to  0.000000
10/14/2011	3:00:16 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:00:16 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:00:16 PM	Tube furnace set to 0
10/14/2011	3:00:46 PM	H2 valve closed
10/14/2011	3:00:46 PM	BCl3 valve closed
10/14/2011	3:00:46 PM	PH3 valve closed
10/14/2011	3:00:46 PM	SiCl4 pre valve closed
10/14/2011	3:00:46 PM	SiCl4 post valve closed
10/14/2011	3:00:46 PM	Bypass valve closed
10/14/2011	3:00:46 PM	Bubbler valve closed
10/14/2011	3:00:46 PM	Helium valve opened
10/14/2011	3:00:46 PM	Main Vac valve opened
10/14/2011	3:00:46 PM	Helium MFC set to  20.000000
10/14/2011	3:00:46 PM	H2 MFC set to  0.000000
10/14/2011	3:00:46 PM	BCl3 MFC set to  0.000000
10/14/2011	3:00:46 PM	PHl3 MFC set to  0.000000
10/14/2011	3:00:46 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:00:46 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:00:46 PM	Tube furnace set to 0
10/14/2011	3:01:16 PM	Helium valve closed
10/14/2011	3:01:16 PM	H2 valve closed
10/14/2011	3:01:16 PM	BCl3 valve closed
10/14/2011	3:01:16 PM	PH3 valve closed
10/14/2011	3:01:16 PM	SiCl4 pre valve closed
10/14/2011	3:01:16 PM	SiCl4 post valve closed
10/14/2011	3:01:16 PM	Bypass valve closed
10/14/2011	3:01:16 PM	Bubbler valve closed
10/14/2011	3:01:16 PM	Main Vac valve opened
10/14/2011	3:01:16 PM	Helium MFC set to  0.000000
10/14/2011	3:01:16 PM	H2 MFC set to  0.000000
10/14/2011	3:01:16 PM	BCl3 MFC set to  0.000000
10/14/2011	3:01:16 PM	PHl3 MFC set to  0.000000
10/14/2011	3:01:16 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:01:16 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:01:17 PM	Tube furnace set to 0
10/14/2011	3:01:47 PM	H2 valve closed
10/14/2011	3:01:47 PM	BCl3 valve closed
10/14/2011	3:01:47 PM	PH3 valve closed
10/14/2011	3:01:47 PM	SiCl4 pre valve closed
10/14/2011	3:01:47 PM	SiCl4 post valve closed
10/14/2011	3:01:47 PM	Bypass valve closed
10/14/2011	3:01:47 PM	Bubbler valve closed
10/14/2011	3:01:47 PM	Helium valve opened
10/14/2011	3:01:47 PM	Main Vac valve opened
10/14/2011	3:01:47 PM	Helium MFC set to  20.000000
10/14/2011	3:01:47 PM	H2 MFC set to  0.000000
10/14/2011	3:01:47 PM	BCl3 MFC set to  0.000000
10/14/2011	3:01:47 PM	PHl3 MFC set to  0.000000
10/14/2011	3:01:47 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:01:47 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:01:47 PM	Tube furnace set to 0
10/14/2011	3:02:17 PM	Helium valve closed
10/14/2011	3:02:17 PM	H2 valve closed
10/14/2011	3:02:17 PM	BCl3 valve closed
10/14/2011	3:02:17 PM	PH3 valve closed
10/14/2011	3:02:17 PM	SiCl4 pre valve closed
10/14/2011	3:02:17 PM	SiCl4 post valve closed
10/14/2011	3:02:17 PM	Bypass valve closed
10/14/2011	3:02:17 PM	Bubbler valve closed
10/14/2011	3:02:17 PM	Main Vac valve opened
10/14/2011	3:02:17 PM	Helium MFC set to  0.000000
10/14/2011	3:02:17 PM	H2 MFC set to  0.000000
10/14/2011	3:02:17 PM	BCl3 MFC set to  0.000000
10/14/2011	3:02:17 PM	PHl3 MFC set to  0.000000
10/14/2011	3:02:17 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:02:17 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:02:17 PM	Tube furnace set to 0
10/14/2011	3:02:47 PM	H2 valve closed
10/14/2011	3:02:47 PM	BCl3 valve closed
10/14/2011	3:02:47 PM	PH3 valve closed
10/14/2011	3:02:47 PM	SiCl4 pre valve closed
10/14/2011	3:02:47 PM	SiCl4 post valve closed
10/14/2011	3:02:47 PM	Bypass valve closed
10/14/2011	3:02:47 PM	Bubbler valve closed
10/14/2011	3:02:47 PM	Helium valve opened
10/14/2011	3:02:47 PM	Main Vac valve opened
10/14/2011	3:02:47 PM	Helium MFC set to  20.000000
10/14/2011	3:02:47 PM	H2 MFC set to  0.000000
10/14/2011	3:02:47 PM	BCl3 MFC set to  0.000000
10/14/2011	3:02:47 PM	PHl3 MFC set to  0.000000
10/14/2011	3:02:47 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:02:47 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:02:47 PM	Tube furnace set to 0
10/14/2011	3:03:17 PM	Helium valve closed
10/14/2011	3:03:17 PM	H2 valve closed
10/14/2011	3:03:17 PM	BCl3 valve closed
10/14/2011	3:03:17 PM	PH3 valve closed
10/14/2011	3:03:17 PM	SiCl4 pre valve closed
10/14/2011	3:03:17 PM	SiCl4 post valve closed
10/14/2011	3:03:17 PM	Bypass valve closed
10/14/2011	3:03:17 PM	Bubbler valve closed
10/14/2011	3:03:17 PM	Main Vac valve opened
10/14/2011	3:03:17 PM	Helium MFC set to  0.000000
10/14/2011	3:03:17 PM	H2 MFC set to  0.000000
10/14/2011	3:03:17 PM	BCl3 MFC set to  0.000000
10/14/2011	3:03:17 PM	PHl3 MFC set to  0.000000
10/14/2011	3:03:17 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:03:17 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:03:17 PM	Tube furnace set to 0
10/14/2011	3:03:47 PM	H2 valve closed
10/14/2011	3:03:47 PM	BCl3 valve closed
10/14/2011	3:03:47 PM	PH3 valve closed
10/14/2011	3:03:47 PM	SiCl4 pre valve closed
10/14/2011	3:03:47 PM	SiCl4 post valve closed
10/14/2011	3:03:47 PM	Bypass valve closed
10/14/2011	3:03:47 PM	Bubbler valve closed
10/14/2011	3:03:47 PM	Helium valve opened
10/14/2011	3:03:47 PM	Main Vac valve opened
10/14/2011	3:03:47 PM	Helium MFC set to  20.000000
10/14/2011	3:03:47 PM	H2 MFC set to  0.000000
10/14/2011	3:03:47 PM	BCl3 MFC set to  0.000000
10/14/2011	3:03:47 PM	PHl3 MFC set to  0.000000
10/14/2011	3:03:47 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:03:47 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:03:48 PM	Tube furnace set to 0
10/14/2011	3:04:18 PM	Helium valve closed
10/14/2011	3:04:18 PM	H2 valve closed
10/14/2011	3:04:18 PM	BCl3 valve closed
10/14/2011	3:04:18 PM	PH3 valve closed
10/14/2011	3:04:18 PM	SiCl4 pre valve closed
10/14/2011	3:04:18 PM	SiCl4 post valve closed
10/14/2011	3:04:18 PM	Bypass valve closed
10/14/2011	3:04:18 PM	Bubbler valve closed
10/14/2011	3:04:18 PM	Main Vac valve opened
10/14/2011	3:04:18 PM	Helium MFC set to  0.000000
10/14/2011	3:04:18 PM	H2 MFC set to  0.000000
10/14/2011	3:04:18 PM	BCl3 MFC set to  0.000000
10/14/2011	3:04:18 PM	PHl3 MFC set to  0.000000
10/14/2011	3:04:18 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:04:18 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:04:18 PM	Tube furnace set to 0
10/14/2011	3:04:48 PM	H2 valve closed
10/14/2011	3:04:48 PM	BCl3 valve closed
10/14/2011	3:04:48 PM	PH3 valve closed
10/14/2011	3:04:48 PM	SiCl4 pre valve closed
10/14/2011	3:04:48 PM	SiCl4 post valve closed
10/14/2011	3:04:48 PM	Bypass valve closed
10/14/2011	3:04:48 PM	Bubbler valve closed
10/14/2011	3:04:48 PM	Helium valve opened
10/14/2011	3:04:48 PM	Main Vac valve opened
10/14/2011	3:04:48 PM	Helium MFC set to  20.000000
10/14/2011	3:04:48 PM	H2 MFC set to  0.000000
10/14/2011	3:04:48 PM	BCl3 MFC set to  0.000000
10/14/2011	3:04:48 PM	PHl3 MFC set to  0.000000
10/14/2011	3:04:48 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:04:48 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:04:48 PM	Tube furnace set to 0
10/14/2011	3:05:18 PM	Helium valve closed
10/14/2011	3:05:18 PM	H2 valve closed
10/14/2011	3:05:18 PM	BCl3 valve closed
10/14/2011	3:05:18 PM	PH3 valve closed
10/14/2011	3:05:18 PM	SiCl4 pre valve closed
10/14/2011	3:05:18 PM	SiCl4 post valve closed
10/14/2011	3:05:18 PM	Bypass valve closed
10/14/2011	3:05:18 PM	Bubbler valve closed
10/14/2011	3:05:18 PM	Main Vac valve opened
10/14/2011	3:05:18 PM	Helium MFC set to  0.000000
10/14/2011	3:05:18 PM	H2 MFC set to  0.000000
10/14/2011	3:05:18 PM	BCl3 MFC set to  0.000000
10/14/2011	3:05:18 PM	PHl3 MFC set to  0.000000
10/14/2011	3:05:18 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:05:18 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:05:18 PM	Tube furnace set to 0
10/14/2011	3:05:48 PM	H2 valve closed
10/14/2011	3:05:48 PM	BCl3 valve closed
10/14/2011	3:05:48 PM	PH3 valve closed
10/14/2011	3:05:48 PM	SiCl4 pre valve closed
10/14/2011	3:05:48 PM	SiCl4 post valve closed
10/14/2011	3:05:48 PM	Bypass valve closed
10/14/2011	3:05:48 PM	Bubbler valve closed
10/14/2011	3:05:48 PM	Helium valve opened
10/14/2011	3:05:48 PM	Main Vac valve opened
10/14/2011	3:05:48 PM	Helium MFC set to  20.000000
10/14/2011	3:05:48 PM	H2 MFC set to  0.000000
10/14/2011	3:05:48 PM	BCl3 MFC set to  0.000000
10/14/2011	3:05:48 PM	PHl3 MFC set to  0.000000
10/14/2011	3:05:48 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:05:48 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:05:48 PM	Tube furnace set to 0
10/14/2011	3:06:18 PM	Helium valve closed
10/14/2011	3:06:18 PM	H2 valve closed
10/14/2011	3:06:19 PM	BCl3 valve closed
10/14/2011	3:06:19 PM	PH3 valve closed
10/14/2011	3:06:19 PM	SiCl4 pre valve closed
10/14/2011	3:06:19 PM	SiCl4 post valve closed
10/14/2011	3:06:19 PM	Bypass valve closed
10/14/2011	3:06:19 PM	Bubbler valve closed
10/14/2011	3:06:19 PM	Main Vac valve opened
10/14/2011	3:06:19 PM	Helium MFC set to  0.000000
10/14/2011	3:06:19 PM	H2 MFC set to  0.000000
10/14/2011	3:06:19 PM	BCl3 MFC set to  0.000000
10/14/2011	3:06:19 PM	PHl3 MFC set to  0.000000
10/14/2011	3:06:19 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:06:19 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:06:19 PM	Tube furnace set to 0
10/14/2011	3:06:49 PM	H2 valve closed
10/14/2011	3:06:49 PM	BCl3 valve closed
10/14/2011	3:06:49 PM	PH3 valve closed
10/14/2011	3:06:49 PM	SiCl4 pre valve closed
10/14/2011	3:06:49 PM	SiCl4 post valve closed
10/14/2011	3:06:49 PM	Bypass valve closed
10/14/2011	3:06:49 PM	Bubbler valve closed
10/14/2011	3:06:49 PM	Helium valve opened
10/14/2011	3:06:49 PM	Main Vac valve opened
10/14/2011	3:06:49 PM	Helium MFC set to  20.000000
10/14/2011	3:06:49 PM	H2 MFC set to  0.000000
10/14/2011	3:06:49 PM	BCl3 MFC set to  0.000000
10/14/2011	3:06:49 PM	PHl3 MFC set to  0.000000
10/14/2011	3:06:49 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:06:49 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:06:49 PM	Tube furnace set to 0
10/14/2011	3:07:19 PM	Helium valve closed
10/14/2011	3:07:19 PM	H2 valve closed
10/14/2011	3:07:19 PM	BCl3 valve closed
10/14/2011	3:07:19 PM	PH3 valve closed
10/14/2011	3:07:19 PM	SiCl4 pre valve closed
10/14/2011	3:07:19 PM	SiCl4 post valve closed
10/14/2011	3:07:19 PM	Bypass valve closed
10/14/2011	3:07:19 PM	Bubbler valve closed
10/14/2011	3:07:19 PM	Main Vac valve opened
10/14/2011	3:07:19 PM	Helium MFC set to  0.000000
10/14/2011	3:07:19 PM	H2 MFC set to  0.000000
10/14/2011	3:07:19 PM	BCl3 MFC set to  0.000000
10/14/2011	3:07:19 PM	PHl3 MFC set to  0.000000
10/14/2011	3:07:19 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:07:19 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:07:19 PM	Tube furnace set to 0
10/14/2011	3:07:49 PM	H2 valve closed
10/14/2011	3:07:49 PM	BCl3 valve closed
10/14/2011	3:07:49 PM	PH3 valve closed
10/14/2011	3:07:49 PM	SiCl4 pre valve closed
10/14/2011	3:07:49 PM	SiCl4 post valve closed
10/14/2011	3:07:49 PM	Bypass valve closed
10/14/2011	3:07:49 PM	Bubbler valve closed
10/14/2011	3:07:49 PM	Helium valve opened
10/14/2011	3:07:49 PM	Main Vac valve opened
10/14/2011	3:07:49 PM	Helium MFC set to  20.000000
10/14/2011	3:07:49 PM	H2 MFC set to  0.000000
10/14/2011	3:07:49 PM	BCl3 MFC set to  0.000000
10/14/2011	3:07:49 PM	PHl3 MFC set to  0.000000
10/14/2011	3:07:49 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:07:49 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:07:49 PM	Tube furnace set to 0
10/14/2011	3:08:19 PM	Helium valve closed
10/14/2011	3:08:19 PM	H2 valve closed
10/14/2011	3:08:19 PM	BCl3 valve closed
10/14/2011	3:08:19 PM	PH3 valve closed
10/14/2011	3:08:19 PM	SiCl4 pre valve closed
10/14/2011	3:08:19 PM	SiCl4 post valve closed
10/14/2011	3:08:19 PM	Bypass valve closed
10/14/2011	3:08:19 PM	Bubbler valve closed
10/14/2011	3:08:19 PM	Main Vac valve opened
10/14/2011	3:08:19 PM	Helium MFC set to  0.000000
10/14/2011	3:08:19 PM	H2 MFC set to  0.000000
10/14/2011	3:08:19 PM	BCl3 MFC set to  0.000000
10/14/2011	3:08:19 PM	PHl3 MFC set to  0.000000
10/14/2011	3:08:19 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:08:19 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:08:20 PM	Tube furnace set to 0
10/14/2011	3:08:50 PM	H2 valve closed
10/14/2011	3:08:50 PM	BCl3 valve closed
10/14/2011	3:08:50 PM	PH3 valve closed
10/14/2011	3:08:50 PM	SiCl4 pre valve closed
10/14/2011	3:08:50 PM	SiCl4 post valve closed
10/14/2011	3:08:50 PM	Bypass valve closed
10/14/2011	3:08:50 PM	Bubbler valve closed
10/14/2011	3:08:50 PM	Helium valve opened
10/14/2011	3:08:50 PM	Main Vac valve opened
10/14/2011	3:08:50 PM	Helium MFC set to  20.000000
10/14/2011	3:08:50 PM	H2 MFC set to  0.000000
10/14/2011	3:08:50 PM	BCl3 MFC set to  0.000000
10/14/2011	3:08:50 PM	PHl3 MFC set to  0.000000
10/14/2011	3:08:50 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:08:50 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:08:50 PM	Tube furnace set to 0
10/14/2011	3:09:20 PM	Helium valve closed
10/14/2011	3:09:20 PM	H2 valve closed
10/14/2011	3:09:20 PM	BCl3 valve closed
10/14/2011	3:09:20 PM	PH3 valve closed
10/14/2011	3:09:20 PM	SiCl4 pre valve closed
10/14/2011	3:09:20 PM	SiCl4 post valve closed
10/14/2011	3:09:20 PM	Bypass valve closed
10/14/2011	3:09:20 PM	Bubbler valve closed
10/14/2011	3:09:20 PM	Main Vac valve opened
10/14/2011	3:09:20 PM	Helium MFC set to  0.000000
10/14/2011	3:09:20 PM	H2 MFC set to  0.000000
10/14/2011	3:09:20 PM	BCl3 MFC set to  0.000000
10/14/2011	3:09:20 PM	PHl3 MFC set to  0.000000
10/14/2011	3:09:20 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:09:20 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:09:20 PM	Tube furnace set to 0
10/14/2011	3:09:50 PM	H2 valve closed
10/14/2011	3:09:50 PM	BCl3 valve closed
10/14/2011	3:09:50 PM	PH3 valve closed
10/14/2011	3:09:50 PM	SiCl4 pre valve closed
10/14/2011	3:09:50 PM	SiCl4 post valve closed
10/14/2011	3:09:50 PM	Bypass valve closed
10/14/2011	3:09:50 PM	Bubbler valve closed
10/14/2011	3:09:50 PM	Helium valve opened
10/14/2011	3:09:50 PM	Main Vac valve opened
10/14/2011	3:09:50 PM	Helium MFC set to  20.000000
10/14/2011	3:09:50 PM	H2 MFC set to  0.000000
10/14/2011	3:09:50 PM	BCl3 MFC set to  0.000000
10/14/2011	3:09:50 PM	PHl3 MFC set to  0.000000
10/14/2011	3:09:50 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:09:50 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:09:50 PM	Tube furnace set to 0
10/14/2011	3:10:20 PM	Helium valve closed
10/14/2011	3:10:20 PM	H2 valve closed
10/14/2011	3:10:20 PM	BCl3 valve closed
10/14/2011	3:10:20 PM	PH3 valve closed
10/14/2011	3:10:20 PM	SiCl4 pre valve closed
10/14/2011	3:10:20 PM	SiCl4 post valve closed
10/14/2011	3:10:20 PM	Bypass valve closed
10/14/2011	3:10:20 PM	Bubbler valve closed
10/14/2011	3:10:20 PM	Main Vac valve opened
10/14/2011	3:10:20 PM	Helium MFC set to  0.000000
10/14/2011	3:10:20 PM	H2 MFC set to  0.000000
10/14/2011	3:10:20 PM	BCl3 MFC set to  0.000000
10/14/2011	3:10:20 PM	PHl3 MFC set to  0.000000
10/14/2011	3:10:20 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:10:20 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:10:20 PM	Tube furnace set to 0
10/14/2011	3:10:21 PM	Run finished at 3:10 PM
10/14/2011	3:10:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
10/14/2011	3:52:04 PM	Main Vac valve closed
10/14/2011	3:52:23 PM	Main Vac valve opened
10/14/2011	3:53:01 PM	Recipe started at 3:52 PM
10/14/2011	3:53:01 PM	Helium valve closed
10/14/2011	3:53:01 PM	H2 valve closed
10/14/2011	3:53:01 PM	BCl3 valve closed
10/14/2011	3:53:01 PM	PH3 valve closed
10/14/2011	3:53:01 PM	SiCl4 pre valve closed
10/14/2011	3:53:01 PM	SiCl4 post valve closed
10/14/2011	3:53:01 PM	Main Vac valve closed
10/14/2011	3:53:01 PM	Bypass valve closed
10/14/2011	3:53:01 PM	Bubbler valve closed
10/14/2011	3:53:01 PM	Helium MFC set to  0.000000
10/14/2011	3:53:01 PM	H2 MFC set to  0.000000
10/14/2011	3:53:01 PM	BCl3 MFC set to  0.000000
10/14/2011	3:53:01 PM	PHl3 MFC set to  0.000000
10/14/2011	3:53:01 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:53:01 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:53:01 PM	Tube furnace set to 0
10/14/2011	3:53:04 PM	Helium valve closed
10/14/2011	3:53:04 PM	BCl3 valve closed
10/14/2011	3:53:04 PM	PH3 valve closed
10/14/2011	3:53:04 PM	SiCl4 pre valve closed
10/14/2011	3:53:04 PM	SiCl4 post valve closed
10/14/2011	3:53:04 PM	Main Vac valve closed
10/14/2011	3:53:04 PM	Bypass valve closed
10/14/2011	3:53:04 PM	Bubbler valve closed
10/14/2011	3:53:04 PM	H2 valve opened
10/14/2011	3:53:04 PM	Helium MFC set to  0.000000
10/14/2011	3:53:04 PM	H2 MFC set to  500.000000
10/14/2011	3:53:04 PM	BCl3 MFC set to  0.000000
10/14/2011	3:53:04 PM	PHl3 MFC set to  0.000000
10/14/2011	3:53:04 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:53:04 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:53:04 PM	Tube furnace set to 0
10/14/2011	3:54:09 PM	Helium valve closed
10/14/2011	3:54:09 PM	BCl3 valve closed
10/14/2011	3:54:09 PM	PH3 valve closed
10/14/2011	3:54:09 PM	SiCl4 pre valve closed
10/14/2011	3:54:09 PM	SiCl4 post valve closed
10/14/2011	3:54:09 PM	Main Vac valve closed
10/14/2011	3:54:09 PM	Bypass valve closed
10/14/2011	3:54:09 PM	H2 valve opened
10/14/2011	3:54:09 PM	Bubbler valve opened
10/14/2011	3:54:09 PM	Helium MFC set to  0.000000
10/14/2011	3:54:09 PM	H2 MFC set to  500.000000
10/14/2011	3:54:09 PM	BCl3 MFC set to  0.000000
10/14/2011	3:54:09 PM	PHl3 MFC set to  0.000000
10/14/2011	3:54:09 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:54:09 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:54:09 PM	Tube furnace set to 0
10/14/2011	3:54:10 PM	Helium valve closed
10/14/2011	3:54:10 PM	BCl3 valve closed
10/14/2011	3:54:10 PM	PH3 valve closed
10/14/2011	3:54:10 PM	SiCl4 pre valve closed
10/14/2011	3:54:10 PM	SiCl4 post valve closed
10/14/2011	3:54:10 PM	Main Vac valve closed
10/14/2011	3:54:10 PM	Bypass valve closed
10/14/2011	3:54:10 PM	H2 valve opened
10/14/2011	3:54:10 PM	Bubbler valve opened
10/14/2011	3:54:10 PM	Helium MFC set to  0.000000
10/14/2011	3:54:10 PM	H2 MFC set to  500.000000
10/14/2011	3:54:10 PM	BCl3 MFC set to  0.000000
10/14/2011	3:54:10 PM	PHl3 MFC set to  0.000000
10/14/2011	3:54:10 PM	SiCl4 MFC set to  0.000000
10/14/2011	3:54:10 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	3:54:10 PM	Tube furnace set to 1000
10/14/2011	4:14:10 PM	Helium valve closed
10/14/2011	4:14:10 PM	BCl3 valve closed
10/14/2011	4:14:10 PM	PH3 valve closed
10/14/2011	4:14:10 PM	Main Vac valve closed
10/14/2011	4:14:10 PM	Bypass valve closed
10/14/2011	4:14:10 PM	H2 valve opened
10/14/2011	4:14:10 PM	SiCl4 pre valve opened
10/14/2011	4:14:10 PM	SiCl4 post valve opened
10/14/2011	4:14:10 PM	Bubbler valve opened
10/14/2011	4:14:10 PM	Helium MFC set to  0.000000
10/14/2011	4:14:10 PM	H2 MFC set to  500.000000
10/14/2011	4:14:10 PM	BCl3 MFC set to  0.000000
10/14/2011	4:14:10 PM	PHl3 MFC set to  0.000000
10/14/2011	4:14:10 PM	SiCl4 MFC set to  50.000000
10/14/2011	4:14:10 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	4:14:10 PM	Tube furnace set to 1000
10/14/2011	4:28:10 PM	Helium valve closed
10/14/2011	4:28:10 PM	BCl3 valve closed
10/14/2011	4:28:10 PM	PH3 valve closed
10/14/2011	4:28:10 PM	SiCl4 pre valve closed
10/14/2011	4:28:10 PM	SiCl4 post valve closed
10/14/2011	4:28:10 PM	Main Vac valve closed
10/14/2011	4:28:10 PM	Bypass valve closed
10/14/2011	4:28:10 PM	H2 valve opened
10/14/2011	4:28:10 PM	Bubbler valve opened
10/14/2011	4:28:10 PM	Helium MFC set to  0.000000
10/14/2011	4:28:10 PM	H2 MFC set to  500.000000
10/14/2011	4:28:10 PM	BCl3 MFC set to  0.000000
10/14/2011	4:28:10 PM	PHl3 MFC set to  0.000000
10/14/2011	4:28:10 PM	SiCl4 MFC set to  0.000000
10/14/2011	4:28:10 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	4:28:11 PM	Tube furnace set to 750
10/14/2011	4:33:11 PM	H2 valve closed
10/14/2011	4:33:11 PM	BCl3 valve closed
10/14/2011	4:33:11 PM	PH3 valve closed
10/14/2011	4:33:11 PM	SiCl4 pre valve closed
10/14/2011	4:33:11 PM	SiCl4 post valve closed
10/14/2011	4:33:11 PM	Main Vac valve closed
10/14/2011	4:33:11 PM	Bypass valve closed
10/14/2011	4:33:11 PM	Helium valve opened
10/14/2011	4:33:11 PM	Bubbler valve opened
10/14/2011	4:33:11 PM	Helium MFC set to  500.000000
10/14/2011	4:33:11 PM	H2 MFC set to  0.000000
10/14/2011	4:33:11 PM	BCl3 MFC set to  0.000000
10/14/2011	4:33:11 PM	PHl3 MFC set to  0.000000
10/14/2011	4:33:11 PM	SiCl4 MFC set to  0.000000
10/14/2011	4:33:11 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	4:33:11 PM	Tube furnace set to 0
10/14/2011	4:53:11 PM	Helium valve closed
10/14/2011	4:53:11 PM	H2 valve closed
10/14/2011	4:53:11 PM	BCl3 valve closed
10/14/2011	4:53:11 PM	PH3 valve closed
10/14/2011	4:53:11 PM	SiCl4 pre valve closed
10/14/2011	4:53:11 PM	SiCl4 post valve closed
10/14/2011	4:53:11 PM	Main Vac valve closed
10/14/2011	4:53:11 PM	Bypass valve closed
10/14/2011	4:53:11 PM	Bubbler valve closed
10/14/2011	4:53:11 PM	Helium MFC set to  0.000000
10/14/2011	4:53:11 PM	H2 MFC set to  0.000000
10/14/2011	4:53:11 PM	BCl3 MFC set to  0.000000
10/14/2011	4:53:11 PM	PHl3 MFC set to  0.000000
10/14/2011	4:53:11 PM	SiCl4 MFC set to  0.000000
10/14/2011	4:53:11 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	4:53:11 PM	Tube furnace set to 0
10/14/2011	5:13:11 PM	Helium valve closed
10/14/2011	5:13:11 PM	H2 valve closed
10/14/2011	5:13:11 PM	BCl3 valve closed
10/14/2011	5:13:11 PM	PH3 valve closed
10/14/2011	5:13:11 PM	SiCl4 pre valve closed
10/14/2011	5:13:11 PM	SiCl4 post valve closed
10/14/2011	5:13:11 PM	Main Vac valve closed
10/14/2011	5:13:11 PM	Bubbler valve closed
10/14/2011	5:13:11 PM	Bypass valve opened
10/14/2011	5:13:11 PM	Helium MFC set to  0.000000
10/14/2011	5:13:11 PM	H2 MFC set to  0.000000
10/14/2011	5:13:11 PM	BCl3 MFC set to  0.000000
10/14/2011	5:13:11 PM	PHl3 MFC set to  0.000000
10/14/2011	5:13:11 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:13:11 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:13:11 PM	Tube furnace set to 0
10/14/2011	5:14:07 PM	Helium valve closed
10/14/2011	5:14:07 PM	H2 valve closed
10/14/2011	5:14:07 PM	BCl3 valve closed
10/14/2011	5:14:07 PM	PH3 valve closed
10/14/2011	5:14:07 PM	SiCl4 pre valve closed
10/14/2011	5:14:07 PM	SiCl4 post valve closed
10/14/2011	5:14:07 PM	Main Vac valve closed
10/14/2011	5:14:07 PM	Bubbler valve closed
10/14/2011	5:14:07 PM	Bypass valve opened
10/14/2011	5:14:07 PM	Helium MFC set to  0.000000
10/14/2011	5:14:07 PM	H2 MFC set to  0.000000
10/14/2011	5:14:07 PM	BCl3 MFC set to  0.000000
10/14/2011	5:14:07 PM	PHl3 MFC set to  0.000000
10/14/2011	5:14:07 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:14:07 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:14:08 PM	Tube furnace set to 0
10/14/2011	5:15:08 PM	Helium valve closed
10/14/2011	5:15:08 PM	H2 valve closed
10/14/2011	5:15:08 PM	BCl3 valve closed
10/14/2011	5:15:08 PM	PH3 valve closed
10/14/2011	5:15:08 PM	SiCl4 pre valve closed
10/14/2011	5:15:08 PM	SiCl4 post valve closed
10/14/2011	5:15:08 PM	Bypass valve closed
10/14/2011	5:15:08 PM	Bubbler valve closed
10/14/2011	5:15:08 PM	Main Vac valve opened
10/14/2011	5:15:08 PM	Helium MFC set to  0.000000
10/14/2011	5:15:08 PM	H2 MFC set to  0.000000
10/14/2011	5:15:08 PM	BCl3 MFC set to  0.000000
10/14/2011	5:15:08 PM	PHl3 MFC set to  0.000000
10/14/2011	5:15:08 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:15:08 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:15:08 PM	Tube furnace set to 0
10/14/2011	5:18:49 PM	Run aborted at 5:18 PM
10/14/2011	5:18:49 PM	Helium valve closed
10/14/2011	5:18:49 PM	H2 valve closed
10/14/2011	5:18:49 PM	BCl3 valve closed
10/14/2011	5:18:49 PM	PH3 valve closed
10/14/2011	5:18:49 PM	SiCl4 pre valve closed
10/14/2011	5:18:49 PM	SiCl4 post valve closed
10/14/2011	5:18:49 PM	Bypass valve closed
10/14/2011	5:18:49 PM	Main Vac valve closed
10/14/2011	5:18:49 PM	Bubbler valve closed
10/14/2011	5:18:49 PM	Helium MFC set to  0.000000
10/14/2011	5:18:49 PM	H2 MFC set to  0.000000
10/14/2011	5:18:49 PM	BCl3 MFC set to  0.000000
10/14/2011	5:18:49 PM	PHl3 MFC set to  0.000000
10/14/2011	5:18:49 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:18:49 PM	Tube furnace set to 0
10/14/2011	5:18:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	5:18:53 PM	Recipe started at 5:18 PM
10/14/2011	5:18:53 PM	Helium valve closed
10/14/2011	5:18:53 PM	H2 valve closed
10/14/2011	5:18:53 PM	BCl3 valve closed
10/14/2011	5:18:53 PM	PH3 valve closed
10/14/2011	5:18:53 PM	SiCl4 pre valve closed
10/14/2011	5:18:53 PM	SiCl4 post valve closed
10/14/2011	5:18:53 PM	Main Vac valve closed
10/14/2011	5:18:53 PM	Bypass valve closed
10/14/2011	5:18:53 PM	Bubbler valve closed
10/14/2011	5:18:53 PM	Helium MFC set to  0.000000
10/14/2011	5:18:53 PM	H2 MFC set to  0.000000
10/14/2011	5:18:53 PM	BCl3 MFC set to  0.000000
10/14/2011	5:18:53 PM	PHl3 MFC set to  0.000000
10/14/2011	5:18:53 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:18:53 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:18:53 PM	Tube furnace set to 0
10/14/2011	5:18:56 PM	H2 valve closed
10/14/2011	5:18:56 PM	BCl3 valve closed
10/14/2011	5:18:56 PM	PH3 valve closed
10/14/2011	5:18:56 PM	SiCl4 pre valve closed
10/14/2011	5:18:56 PM	SiCl4 post valve closed
10/14/2011	5:18:56 PM	Main Vac valve closed
10/14/2011	5:18:56 PM	Bypass valve closed
10/14/2011	5:18:56 PM	Bubbler valve closed
10/14/2011	5:18:56 PM	Helium valve opened
10/14/2011	5:18:56 PM	Helium MFC set to  500.000000
10/14/2011	5:18:56 PM	H2 MFC set to  0.000000
10/14/2011	5:18:56 PM	BCl3 MFC set to  0.000000
10/14/2011	5:18:56 PM	PHl3 MFC set to  0.000000
10/14/2011	5:18:56 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:18:56 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:18:56 PM	Tube furnace set to 0
10/14/2011	5:20:00 PM	Helium valve closed
10/14/2011	5:20:00 PM	H2 valve closed
10/14/2011	5:20:00 PM	BCl3 valve closed
10/14/2011	5:20:00 PM	PH3 valve closed
10/14/2011	5:20:00 PM	SiCl4 pre valve closed
10/14/2011	5:20:00 PM	SiCl4 post valve closed
10/14/2011	5:20:00 PM	Main Vac valve closed
10/14/2011	5:20:00 PM	Bypass valve closed
10/14/2011	5:20:00 PM	Bubbler valve closed
10/14/2011	5:20:00 PM	Helium MFC set to  0.000000
10/14/2011	5:20:00 PM	H2 MFC set to  0.000000
10/14/2011	5:20:00 PM	BCl3 MFC set to  0.000000
10/14/2011	5:20:00 PM	PHl3 MFC set to  0.000000
10/14/2011	5:20:00 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:20:00 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:20:00 PM	Tube furnace set to 0
10/14/2011	5:20:01 PM	Run finished at 5:20 PM
10/14/2011	5:20:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	5:25:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	5:26:00 PM	Recipe started at 5:25 PM
10/14/2011	5:26:00 PM	Helium valve closed
10/14/2011	5:26:00 PM	H2 valve closed
10/14/2011	5:26:00 PM	BCl3 valve closed
10/14/2011	5:26:00 PM	PH3 valve closed
10/14/2011	5:26:00 PM	SiCl4 pre valve closed
10/14/2011	5:26:00 PM	SiCl4 post valve closed
10/14/2011	5:26:00 PM	Main Vac valve closed
10/14/2011	5:26:00 PM	Bubbler valve closed
10/14/2011	5:26:00 PM	Bypass valve opened
10/14/2011	5:26:00 PM	Helium MFC set to  0.000000
10/14/2011	5:26:00 PM	H2 MFC set to  0.000000
10/14/2011	5:26:00 PM	BCl3 MFC set to  0.000000
10/14/2011	5:26:00 PM	PHl3 MFC set to  0.000000
10/14/2011	5:26:00 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:26:00 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:26:00 PM	Tube furnace set to 0
10/14/2011	5:27:11 PM	Helium valve closed
10/14/2011	5:27:11 PM	H2 valve closed
10/14/2011	5:27:11 PM	BCl3 valve closed
10/14/2011	5:27:11 PM	PH3 valve closed
10/14/2011	5:27:11 PM	SiCl4 pre valve closed
10/14/2011	5:27:11 PM	SiCl4 post valve closed
10/14/2011	5:27:11 PM	Main Vac valve closed
10/14/2011	5:27:11 PM	Bubbler valve closed
10/14/2011	5:27:11 PM	Bypass valve opened
10/14/2011	5:27:11 PM	Helium MFC set to  0.000000
10/14/2011	5:27:11 PM	H2 MFC set to  0.000000
10/14/2011	5:27:11 PM	BCl3 MFC set to  0.000000
10/14/2011	5:27:11 PM	PHl3 MFC set to  0.000000
10/14/2011	5:27:11 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:27:11 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:27:11 PM	Tube furnace set to 0
10/14/2011	5:27:38 PM	Run aborted at 5:27 PM
10/14/2011	5:27:38 PM	Helium valve closed
10/14/2011	5:27:38 PM	H2 valve closed
10/14/2011	5:27:38 PM	BCl3 valve closed
10/14/2011	5:27:38 PM	PH3 valve closed
10/14/2011	5:27:38 PM	SiCl4 pre valve closed
10/14/2011	5:27:38 PM	SiCl4 post valve closed
10/14/2011	5:27:38 PM	Bypass valve closed
10/14/2011	5:27:38 PM	Main Vac valve closed
10/14/2011	5:27:38 PM	Bubbler valve closed
10/14/2011	5:27:38 PM	Helium MFC set to  0.000000
10/14/2011	5:27:38 PM	H2 MFC set to  0.000000
10/14/2011	5:27:38 PM	BCl3 MFC set to  0.000000
10/14/2011	5:27:38 PM	PHl3 MFC set to  0.000000
10/14/2011	5:27:38 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:27:38 PM	Tube furnace set to 0
10/14/2011	5:27:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	5:27:41 PM	Bypass valve opened
10/14/2011	5:27:56 PM	Bypass valve closed
10/14/2011	5:27:57 PM	Main Vac valve opened
10/14/2011	5:28:52 PM	Recipe started at 5:28 PM
10/14/2011	5:28:52 PM	Helium valve closed
10/14/2011	5:28:52 PM	H2 valve closed
10/14/2011	5:28:52 PM	BCl3 valve closed
10/14/2011	5:28:52 PM	PH3 valve closed
10/14/2011	5:28:52 PM	SiCl4 pre valve closed
10/14/2011	5:28:52 PM	SiCl4 post valve closed
10/14/2011	5:28:52 PM	Bypass valve closed
10/14/2011	5:28:52 PM	Bubbler valve closed
10/14/2011	5:28:52 PM	Main Vac valve opened
10/14/2011	5:28:52 PM	Helium MFC set to  0.000000
10/14/2011	5:28:52 PM	H2 MFC set to  0.000000
10/14/2011	5:28:52 PM	BCl3 MFC set to  0.000000
10/14/2011	5:28:52 PM	PHl3 MFC set to  0.000000
10/14/2011	5:28:52 PM	SiCl4 MFC set to  0.000000
10/14/2011	5:28:52 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	5:28:52 PM	Tube furnace set to 0
10/14/2011	6:28:52 PM	H2 valve closed
10/14/2011	6:28:52 PM	BCl3 valve closed
10/14/2011	6:28:52 PM	PH3 valve closed
10/14/2011	6:28:52 PM	SiCl4 pre valve closed
10/14/2011	6:28:52 PM	SiCl4 post valve closed
10/14/2011	6:28:52 PM	Bypass valve closed
10/14/2011	6:28:52 PM	Bubbler valve closed
10/14/2011	6:28:52 PM	Helium valve opened
10/14/2011	6:28:52 PM	Main Vac valve opened
10/14/2011	6:28:52 PM	Helium MFC set to  20.000000
10/14/2011	6:28:52 PM	H2 MFC set to  0.000000
10/14/2011	6:28:52 PM	BCl3 MFC set to  0.000000
10/14/2011	6:28:52 PM	PHl3 MFC set to  0.000000
10/14/2011	6:28:52 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:28:52 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:28:52 PM	Tube furnace set to 0
10/14/2011	6:29:22 PM	Helium valve closed
10/14/2011	6:29:22 PM	H2 valve closed
10/14/2011	6:29:22 PM	BCl3 valve closed
10/14/2011	6:29:22 PM	PH3 valve closed
10/14/2011	6:29:22 PM	SiCl4 pre valve closed
10/14/2011	6:29:22 PM	SiCl4 post valve closed
10/14/2011	6:29:22 PM	Bypass valve closed
10/14/2011	6:29:22 PM	Bubbler valve closed
10/14/2011	6:29:22 PM	Main Vac valve opened
10/14/2011	6:29:22 PM	Helium MFC set to  0.000000
10/14/2011	6:29:22 PM	H2 MFC set to  0.000000
10/14/2011	6:29:22 PM	BCl3 MFC set to  0.000000
10/14/2011	6:29:22 PM	PHl3 MFC set to  0.000000
10/14/2011	6:29:22 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:29:22 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:29:22 PM	Tube furnace set to 0
10/14/2011	6:29:52 PM	H2 valve closed
10/14/2011	6:29:52 PM	BCl3 valve closed
10/14/2011	6:29:52 PM	PH3 valve closed
10/14/2011	6:29:52 PM	SiCl4 pre valve closed
10/14/2011	6:29:52 PM	SiCl4 post valve closed
10/14/2011	6:29:52 PM	Bypass valve closed
10/14/2011	6:29:52 PM	Bubbler valve closed
10/14/2011	6:29:52 PM	Helium valve opened
10/14/2011	6:29:52 PM	Main Vac valve opened
10/14/2011	6:29:52 PM	Helium MFC set to  20.000000
10/14/2011	6:29:52 PM	H2 MFC set to  0.000000
10/14/2011	6:29:52 PM	BCl3 MFC set to  0.000000
10/14/2011	6:29:52 PM	PHl3 MFC set to  0.000000
10/14/2011	6:29:52 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:29:52 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:29:53 PM	Tube furnace set to 0
10/14/2011	6:30:23 PM	Helium valve closed
10/14/2011	6:30:23 PM	H2 valve closed
10/14/2011	6:30:23 PM	BCl3 valve closed
10/14/2011	6:30:23 PM	PH3 valve closed
10/14/2011	6:30:23 PM	SiCl4 pre valve closed
10/14/2011	6:30:23 PM	SiCl4 post valve closed
10/14/2011	6:30:23 PM	Bypass valve closed
10/14/2011	6:30:23 PM	Bubbler valve closed
10/14/2011	6:30:23 PM	Main Vac valve opened
10/14/2011	6:30:23 PM	Helium MFC set to  0.000000
10/14/2011	6:30:23 PM	H2 MFC set to  0.000000
10/14/2011	6:30:23 PM	BCl3 MFC set to  0.000000
10/14/2011	6:30:23 PM	PHl3 MFC set to  0.000000
10/14/2011	6:30:23 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:30:23 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:30:23 PM	Tube furnace set to 0
10/14/2011	6:30:53 PM	H2 valve closed
10/14/2011	6:30:53 PM	BCl3 valve closed
10/14/2011	6:30:53 PM	PH3 valve closed
10/14/2011	6:30:53 PM	SiCl4 pre valve closed
10/14/2011	6:30:53 PM	SiCl4 post valve closed
10/14/2011	6:30:53 PM	Bypass valve closed
10/14/2011	6:30:53 PM	Bubbler valve closed
10/14/2011	6:30:53 PM	Helium valve opened
10/14/2011	6:30:53 PM	Main Vac valve opened
10/14/2011	6:30:53 PM	Helium MFC set to  20.000000
10/14/2011	6:30:53 PM	H2 MFC set to  0.000000
10/14/2011	6:30:53 PM	BCl3 MFC set to  0.000000
10/14/2011	6:30:53 PM	PHl3 MFC set to  0.000000
10/14/2011	6:30:53 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:30:53 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:30:53 PM	Tube furnace set to 0
10/14/2011	6:31:23 PM	Helium valve closed
10/14/2011	6:31:23 PM	H2 valve closed
10/14/2011	6:31:23 PM	BCl3 valve closed
10/14/2011	6:31:23 PM	PH3 valve closed
10/14/2011	6:31:23 PM	SiCl4 pre valve closed
10/14/2011	6:31:23 PM	SiCl4 post valve closed
10/14/2011	6:31:23 PM	Bypass valve closed
10/14/2011	6:31:23 PM	Bubbler valve closed
10/14/2011	6:31:23 PM	Main Vac valve opened
10/14/2011	6:31:23 PM	Helium MFC set to  0.000000
10/14/2011	6:31:23 PM	H2 MFC set to  0.000000
10/14/2011	6:31:23 PM	BCl3 MFC set to  0.000000
10/14/2011	6:31:23 PM	PHl3 MFC set to  0.000000
10/14/2011	6:31:23 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:31:23 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:31:23 PM	Tube furnace set to 0
10/14/2011	6:31:53 PM	H2 valve closed
10/14/2011	6:31:53 PM	BCl3 valve closed
10/14/2011	6:31:53 PM	PH3 valve closed
10/14/2011	6:31:53 PM	SiCl4 pre valve closed
10/14/2011	6:31:53 PM	SiCl4 post valve closed
10/14/2011	6:31:53 PM	Bypass valve closed
10/14/2011	6:31:53 PM	Bubbler valve closed
10/14/2011	6:31:53 PM	Helium valve opened
10/14/2011	6:31:53 PM	Main Vac valve opened
10/14/2011	6:31:53 PM	Helium MFC set to  20.000000
10/14/2011	6:31:53 PM	H2 MFC set to  0.000000
10/14/2011	6:31:53 PM	BCl3 MFC set to  0.000000
10/14/2011	6:31:53 PM	PHl3 MFC set to  0.000000
10/14/2011	6:31:53 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:31:53 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:31:53 PM	Tube furnace set to 0
10/14/2011	6:32:23 PM	Helium valve closed
10/14/2011	6:32:23 PM	H2 valve closed
10/14/2011	6:32:23 PM	BCl3 valve closed
10/14/2011	6:32:23 PM	PH3 valve closed
10/14/2011	6:32:23 PM	SiCl4 pre valve closed
10/14/2011	6:32:23 PM	SiCl4 post valve closed
10/14/2011	6:32:23 PM	Bypass valve closed
10/14/2011	6:32:23 PM	Bubbler valve closed
10/14/2011	6:32:23 PM	Main Vac valve opened
10/14/2011	6:32:23 PM	Helium MFC set to  0.000000
10/14/2011	6:32:23 PM	H2 MFC set to  0.000000
10/14/2011	6:32:23 PM	BCl3 MFC set to  0.000000
10/14/2011	6:32:23 PM	PHl3 MFC set to  0.000000
10/14/2011	6:32:23 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:32:23 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:32:24 PM	Tube furnace set to 0
10/14/2011	6:32:54 PM	H2 valve closed
10/14/2011	6:32:54 PM	BCl3 valve closed
10/14/2011	6:32:54 PM	PH3 valve closed
10/14/2011	6:32:54 PM	SiCl4 pre valve closed
10/14/2011	6:32:54 PM	SiCl4 post valve closed
10/14/2011	6:32:54 PM	Bypass valve closed
10/14/2011	6:32:54 PM	Bubbler valve closed
10/14/2011	6:32:54 PM	Helium valve opened
10/14/2011	6:32:54 PM	Main Vac valve opened
10/14/2011	6:32:54 PM	Helium MFC set to  20.000000
10/14/2011	6:32:54 PM	H2 MFC set to  0.000000
10/14/2011	6:32:54 PM	BCl3 MFC set to  0.000000
10/14/2011	6:32:54 PM	PHl3 MFC set to  0.000000
10/14/2011	6:32:54 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:32:54 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:32:54 PM	Tube furnace set to 0
10/14/2011	6:33:24 PM	Helium valve closed
10/14/2011	6:33:24 PM	H2 valve closed
10/14/2011	6:33:24 PM	BCl3 valve closed
10/14/2011	6:33:24 PM	PH3 valve closed
10/14/2011	6:33:24 PM	SiCl4 pre valve closed
10/14/2011	6:33:24 PM	SiCl4 post valve closed
10/14/2011	6:33:24 PM	Bypass valve closed
10/14/2011	6:33:24 PM	Bubbler valve closed
10/14/2011	6:33:24 PM	Main Vac valve opened
10/14/2011	6:33:24 PM	Helium MFC set to  0.000000
10/14/2011	6:33:24 PM	H2 MFC set to  0.000000
10/14/2011	6:33:24 PM	BCl3 MFC set to  0.000000
10/14/2011	6:33:24 PM	PHl3 MFC set to  0.000000
10/14/2011	6:33:24 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:33:24 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:33:24 PM	Tube furnace set to 0
10/14/2011	6:33:54 PM	H2 valve closed
10/14/2011	6:33:54 PM	BCl3 valve closed
10/14/2011	6:33:54 PM	PH3 valve closed
10/14/2011	6:33:54 PM	SiCl4 pre valve closed
10/14/2011	6:33:54 PM	SiCl4 post valve closed
10/14/2011	6:33:54 PM	Bypass valve closed
10/14/2011	6:33:54 PM	Bubbler valve closed
10/14/2011	6:33:54 PM	Helium valve opened
10/14/2011	6:33:54 PM	Main Vac valve opened
10/14/2011	6:33:54 PM	Helium MFC set to  20.000000
10/14/2011	6:33:54 PM	H2 MFC set to  0.000000
10/14/2011	6:33:54 PM	BCl3 MFC set to  0.000000
10/14/2011	6:33:54 PM	PHl3 MFC set to  0.000000
10/14/2011	6:33:54 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:33:54 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:33:54 PM	Tube furnace set to 0
10/14/2011	6:34:24 PM	Helium valve closed
10/14/2011	6:34:24 PM	H2 valve closed
10/14/2011	6:34:24 PM	BCl3 valve closed
10/14/2011	6:34:24 PM	PH3 valve closed
10/14/2011	6:34:24 PM	SiCl4 pre valve closed
10/14/2011	6:34:24 PM	SiCl4 post valve closed
10/14/2011	6:34:24 PM	Bypass valve closed
10/14/2011	6:34:24 PM	Bubbler valve closed
10/14/2011	6:34:24 PM	Main Vac valve opened
10/14/2011	6:34:24 PM	Helium MFC set to  0.000000
10/14/2011	6:34:24 PM	H2 MFC set to  0.000000
10/14/2011	6:34:24 PM	BCl3 MFC set to  0.000000
10/14/2011	6:34:24 PM	PHl3 MFC set to  0.000000
10/14/2011	6:34:24 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:34:24 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:34:24 PM	Tube furnace set to 0
10/14/2011	6:34:54 PM	H2 valve closed
10/14/2011	6:34:54 PM	BCl3 valve closed
10/14/2011	6:34:54 PM	PH3 valve closed
10/14/2011	6:34:54 PM	SiCl4 pre valve closed
10/14/2011	6:34:54 PM	SiCl4 post valve closed
10/14/2011	6:34:54 PM	Bypass valve closed
10/14/2011	6:34:54 PM	Bubbler valve closed
10/14/2011	6:34:54 PM	Helium valve opened
10/14/2011	6:34:54 PM	Main Vac valve opened
10/14/2011	6:34:54 PM	Helium MFC set to  20.000000
10/14/2011	6:34:54 PM	H2 MFC set to  0.000000
10/14/2011	6:34:54 PM	BCl3 MFC set to  0.000000
10/14/2011	6:34:54 PM	PHl3 MFC set to  0.000000
10/14/2011	6:34:54 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:34:54 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:34:55 PM	Tube furnace set to 0
10/14/2011	6:35:25 PM	Helium valve closed
10/14/2011	6:35:25 PM	H2 valve closed
10/14/2011	6:35:25 PM	BCl3 valve closed
10/14/2011	6:35:25 PM	PH3 valve closed
10/14/2011	6:35:25 PM	SiCl4 pre valve closed
10/14/2011	6:35:25 PM	SiCl4 post valve closed
10/14/2011	6:35:25 PM	Bypass valve closed
10/14/2011	6:35:25 PM	Bubbler valve closed
10/14/2011	6:35:25 PM	Main Vac valve opened
10/14/2011	6:35:25 PM	Helium MFC set to  0.000000
10/14/2011	6:35:25 PM	H2 MFC set to  0.000000
10/14/2011	6:35:25 PM	BCl3 MFC set to  0.000000
10/14/2011	6:35:25 PM	PHl3 MFC set to  0.000000
10/14/2011	6:35:25 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:35:25 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:35:25 PM	Tube furnace set to 0
10/14/2011	6:35:55 PM	H2 valve closed
10/14/2011	6:35:55 PM	BCl3 valve closed
10/14/2011	6:35:55 PM	PH3 valve closed
10/14/2011	6:35:55 PM	SiCl4 pre valve closed
10/14/2011	6:35:55 PM	SiCl4 post valve closed
10/14/2011	6:35:55 PM	Bypass valve closed
10/14/2011	6:35:55 PM	Bubbler valve closed
10/14/2011	6:35:55 PM	Helium valve opened
10/14/2011	6:35:55 PM	Main Vac valve opened
10/14/2011	6:35:55 PM	Helium MFC set to  20.000000
10/14/2011	6:35:55 PM	H2 MFC set to  0.000000
10/14/2011	6:35:55 PM	BCl3 MFC set to  0.000000
10/14/2011	6:35:55 PM	PHl3 MFC set to  0.000000
10/14/2011	6:35:55 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:35:55 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:35:55 PM	Tube furnace set to 0
10/14/2011	6:36:25 PM	Helium valve closed
10/14/2011	6:36:25 PM	H2 valve closed
10/14/2011	6:36:25 PM	BCl3 valve closed
10/14/2011	6:36:25 PM	PH3 valve closed
10/14/2011	6:36:25 PM	SiCl4 pre valve closed
10/14/2011	6:36:25 PM	SiCl4 post valve closed
10/14/2011	6:36:25 PM	Bypass valve closed
10/14/2011	6:36:25 PM	Bubbler valve closed
10/14/2011	6:36:25 PM	Main Vac valve opened
10/14/2011	6:36:25 PM	Helium MFC set to  0.000000
10/14/2011	6:36:25 PM	H2 MFC set to  0.000000
10/14/2011	6:36:25 PM	BCl3 MFC set to  0.000000
10/14/2011	6:36:25 PM	PHl3 MFC set to  0.000000
10/14/2011	6:36:25 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:36:25 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:36:25 PM	Tube furnace set to 0
10/14/2011	6:36:55 PM	H2 valve closed
10/14/2011	6:36:55 PM	BCl3 valve closed
10/14/2011	6:36:55 PM	PH3 valve closed
10/14/2011	6:36:55 PM	SiCl4 pre valve closed
10/14/2011	6:36:55 PM	SiCl4 post valve closed
10/14/2011	6:36:55 PM	Bypass valve closed
10/14/2011	6:36:55 PM	Bubbler valve closed
10/14/2011	6:36:55 PM	Helium valve opened
10/14/2011	6:36:55 PM	Main Vac valve opened
10/14/2011	6:36:55 PM	Helium MFC set to  20.000000
10/14/2011	6:36:55 PM	H2 MFC set to  0.000000
10/14/2011	6:36:55 PM	BCl3 MFC set to  0.000000
10/14/2011	6:36:55 PM	PHl3 MFC set to  0.000000
10/14/2011	6:36:55 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:36:55 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:36:55 PM	Tube furnace set to 0
10/14/2011	6:37:25 PM	Helium valve closed
10/14/2011	6:37:25 PM	H2 valve closed
10/14/2011	6:37:25 PM	BCl3 valve closed
10/14/2011	6:37:25 PM	PH3 valve closed
10/14/2011	6:37:25 PM	SiCl4 pre valve closed
10/14/2011	6:37:25 PM	SiCl4 post valve closed
10/14/2011	6:37:25 PM	Bypass valve closed
10/14/2011	6:37:25 PM	Bubbler valve closed
10/14/2011	6:37:25 PM	Main Vac valve opened
10/14/2011	6:37:25 PM	Helium MFC set to  0.000000
10/14/2011	6:37:25 PM	H2 MFC set to  0.000000
10/14/2011	6:37:25 PM	BCl3 MFC set to  0.000000
10/14/2011	6:37:25 PM	PHl3 MFC set to  0.000000
10/14/2011	6:37:25 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:37:25 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:37:25 PM	Tube furnace set to 0
10/14/2011	6:37:56 PM	H2 valve closed
10/14/2011	6:37:56 PM	BCl3 valve closed
10/14/2011	6:37:56 PM	PH3 valve closed
10/14/2011	6:37:56 PM	SiCl4 pre valve closed
10/14/2011	6:37:56 PM	SiCl4 post valve closed
10/14/2011	6:37:56 PM	Bypass valve closed
10/14/2011	6:37:56 PM	Bubbler valve closed
10/14/2011	6:37:56 PM	Helium valve opened
10/14/2011	6:37:56 PM	Main Vac valve opened
10/14/2011	6:37:56 PM	Helium MFC set to  20.000000
10/14/2011	6:37:56 PM	H2 MFC set to  0.000000
10/14/2011	6:37:56 PM	BCl3 MFC set to  0.000000
10/14/2011	6:37:56 PM	PHl3 MFC set to  0.000000
10/14/2011	6:37:56 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:37:56 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:37:56 PM	Tube furnace set to 0
10/14/2011	6:38:26 PM	Helium valve closed
10/14/2011	6:38:26 PM	H2 valve closed
10/14/2011	6:38:26 PM	BCl3 valve closed
10/14/2011	6:38:26 PM	PH3 valve closed
10/14/2011	6:38:26 PM	SiCl4 pre valve closed
10/14/2011	6:38:26 PM	SiCl4 post valve closed
10/14/2011	6:38:26 PM	Bypass valve closed
10/14/2011	6:38:26 PM	Bubbler valve closed
10/14/2011	6:38:26 PM	Main Vac valve opened
10/14/2011	6:38:26 PM	Helium MFC set to  0.000000
10/14/2011	6:38:26 PM	H2 MFC set to  0.000000
10/14/2011	6:38:26 PM	BCl3 MFC set to  0.000000
10/14/2011	6:38:26 PM	PHl3 MFC set to  0.000000
10/14/2011	6:38:26 PM	SiCl4 MFC set to  0.000000
10/14/2011	6:38:26 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	6:38:26 PM	Tube furnace set to 0
10/14/2011	6:38:27 PM	Run finished at 6:38 PM
10/14/2011	7:18:39 PM	Main Vac valve closed
10/14/2011	7:19:05 PM	Main Vac valve opened
10/14/2011	7:19:47 PM	Recipe started at 7:19 PM
10/14/2011	7:19:47 PM	Helium valve closed
10/14/2011	7:19:47 PM	H2 valve closed
10/14/2011	7:19:47 PM	BCl3 valve closed
10/14/2011	7:19:47 PM	PH3 valve closed
10/14/2011	7:19:47 PM	SiCl4 pre valve closed
10/14/2011	7:19:47 PM	SiCl4 post valve closed
10/14/2011	7:19:47 PM	Main Vac valve closed
10/14/2011	7:19:47 PM	Bypass valve closed
10/14/2011	7:19:47 PM	Bubbler valve closed
10/14/2011	7:19:47 PM	Helium MFC set to  0.000000
10/14/2011	7:19:47 PM	H2 MFC set to  0.000000
10/14/2011	7:19:47 PM	BCl3 MFC set to  0.000000
10/14/2011	7:19:47 PM	PHl3 MFC set to  0.000000
10/14/2011	7:19:47 PM	SiCl4 MFC set to  0.000000
10/14/2011	7:19:47 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	7:19:47 PM	Tube furnace set to 0
10/14/2011	7:19:50 PM	Helium valve closed
10/14/2011	7:19:50 PM	BCl3 valve closed
10/14/2011	7:19:50 PM	PH3 valve closed
10/14/2011	7:19:50 PM	SiCl4 pre valve closed
10/14/2011	7:19:50 PM	SiCl4 post valve closed
10/14/2011	7:19:50 PM	Main Vac valve closed
10/14/2011	7:19:50 PM	Bypass valve closed
10/14/2011	7:19:50 PM	Bubbler valve closed
10/14/2011	7:19:50 PM	H2 valve opened
10/14/2011	7:19:50 PM	Helium MFC set to  0.000000
10/14/2011	7:19:50 PM	H2 MFC set to  500.000000
10/14/2011	7:19:50 PM	BCl3 MFC set to  0.000000
10/14/2011	7:19:50 PM	PHl3 MFC set to  0.000000
10/14/2011	7:19:50 PM	SiCl4 MFC set to  0.000000
10/14/2011	7:19:50 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	7:19:50 PM	Tube furnace set to 0
10/14/2011	7:20:57 PM	Helium valve closed
10/14/2011	7:20:57 PM	BCl3 valve closed
10/14/2011	7:20:57 PM	PH3 valve closed
10/14/2011	7:20:57 PM	SiCl4 pre valve closed
10/14/2011	7:20:57 PM	SiCl4 post valve closed
10/14/2011	7:20:57 PM	Main Vac valve closed
10/14/2011	7:20:57 PM	Bypass valve closed
10/14/2011	7:20:57 PM	H2 valve opened
10/14/2011	7:20:57 PM	Bubbler valve opened
10/14/2011	7:20:57 PM	Helium MFC set to  0.000000
10/14/2011	7:20:57 PM	H2 MFC set to  500.000000
10/14/2011	7:20:57 PM	BCl3 MFC set to  0.000000
10/14/2011	7:20:57 PM	PHl3 MFC set to  0.000000
10/14/2011	7:20:57 PM	SiCl4 MFC set to  0.000000
10/14/2011	7:20:57 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	7:20:57 PM	Tube furnace set to 0
10/14/2011	7:20:58 PM	Helium valve closed
10/14/2011	7:20:58 PM	BCl3 valve closed
10/14/2011	7:20:58 PM	PH3 valve closed
10/14/2011	7:20:58 PM	SiCl4 pre valve closed
10/14/2011	7:20:58 PM	SiCl4 post valve closed
10/14/2011	7:20:58 PM	Main Vac valve closed
10/14/2011	7:20:58 PM	Bypass valve closed
10/14/2011	7:20:58 PM	H2 valve opened
10/14/2011	7:20:58 PM	Bubbler valve opened
10/14/2011	7:20:58 PM	Helium MFC set to  0.000000
10/14/2011	7:20:58 PM	H2 MFC set to  500.000000
10/14/2011	7:20:58 PM	BCl3 MFC set to  0.000000
10/14/2011	7:20:58 PM	PHl3 MFC set to  0.000000
10/14/2011	7:20:58 PM	SiCl4 MFC set to  0.000000
10/14/2011	7:20:58 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	7:20:58 PM	Tube furnace set to 1000
10/14/2011	7:40:58 PM	Helium valve closed
10/14/2011	7:40:58 PM	BCl3 valve closed
10/14/2011	7:40:58 PM	PH3 valve closed
10/14/2011	7:40:58 PM	Main Vac valve closed
10/14/2011	7:40:58 PM	Bypass valve closed
10/14/2011	7:40:58 PM	H2 valve opened
10/14/2011	7:40:58 PM	SiCl4 pre valve opened
10/14/2011	7:40:58 PM	SiCl4 post valve opened
10/14/2011	7:40:58 PM	Bubbler valve opened
10/14/2011	7:40:58 PM	Helium MFC set to  0.000000
10/14/2011	7:40:58 PM	H2 MFC set to  500.000000
10/14/2011	7:40:58 PM	BCl3 MFC set to  0.000000
10/14/2011	7:40:58 PM	PHl3 MFC set to  0.000000
10/14/2011	7:40:58 PM	SiCl4 MFC set to  50.000000
10/14/2011	7:40:58 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	7:40:58 PM	Tube furnace set to 1000
10/14/2011	7:54:58 PM	Helium valve closed
10/14/2011	7:54:58 PM	BCl3 valve closed
10/14/2011	7:54:58 PM	PH3 valve closed
10/14/2011	7:54:58 PM	SiCl4 pre valve closed
10/14/2011	7:54:58 PM	SiCl4 post valve closed
10/14/2011	7:54:58 PM	Main Vac valve closed
10/14/2011	7:54:58 PM	Bypass valve closed
10/14/2011	7:54:58 PM	H2 valve opened
10/14/2011	7:54:58 PM	Bubbler valve opened
10/14/2011	7:54:58 PM	Helium MFC set to  0.000000
10/14/2011	7:54:58 PM	H2 MFC set to  500.000000
10/14/2011	7:54:58 PM	BCl3 MFC set to  0.000000
10/14/2011	7:54:58 PM	PHl3 MFC set to  0.000000
10/14/2011	7:54:58 PM	SiCl4 MFC set to  0.000000
10/14/2011	7:54:58 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	7:54:58 PM	Tube furnace set to 750
10/14/2011	7:59:58 PM	H2 valve closed
10/14/2011	7:59:58 PM	BCl3 valve closed
10/14/2011	7:59:58 PM	PH3 valve closed
10/14/2011	7:59:58 PM	SiCl4 pre valve closed
10/14/2011	7:59:58 PM	SiCl4 post valve closed
10/14/2011	7:59:58 PM	Main Vac valve closed
10/14/2011	7:59:58 PM	Bypass valve closed
10/14/2011	7:59:58 PM	Helium valve opened
10/14/2011	7:59:58 PM	Bubbler valve opened
10/14/2011	7:59:58 PM	Helium MFC set to  500.000000
10/14/2011	7:59:58 PM	H2 MFC set to  0.000000
10/14/2011	7:59:58 PM	BCl3 MFC set to  0.000000
10/14/2011	7:59:58 PM	PHl3 MFC set to  0.000000
10/14/2011	7:59:58 PM	SiCl4 MFC set to  0.000000
10/14/2011	7:59:58 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	7:59:58 PM	Tube furnace set to 0
10/14/2011	8:19:58 PM	Helium valve closed
10/14/2011	8:19:58 PM	H2 valve closed
10/14/2011	8:19:58 PM	BCl3 valve closed
10/14/2011	8:19:58 PM	PH3 valve closed
10/14/2011	8:19:58 PM	SiCl4 pre valve closed
10/14/2011	8:19:58 PM	SiCl4 post valve closed
10/14/2011	8:19:58 PM	Main Vac valve closed
10/14/2011	8:19:58 PM	Bypass valve closed
10/14/2011	8:19:58 PM	Bubbler valve closed
10/14/2011	8:19:58 PM	Helium MFC set to  0.000000
10/14/2011	8:19:58 PM	H2 MFC set to  0.000000
10/14/2011	8:19:58 PM	BCl3 MFC set to  0.000000
10/14/2011	8:19:58 PM	PHl3 MFC set to  0.000000
10/14/2011	8:19:58 PM	SiCl4 MFC set to  0.000000
10/14/2011	8:19:58 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	8:19:59 PM	Tube furnace set to 0
10/14/2011	8:39:59 PM	Helium valve closed
10/14/2011	8:39:59 PM	H2 valve closed
10/14/2011	8:39:59 PM	BCl3 valve closed
10/14/2011	8:39:59 PM	PH3 valve closed
10/14/2011	8:39:59 PM	SiCl4 pre valve closed
10/14/2011	8:39:59 PM	SiCl4 post valve closed
10/14/2011	8:39:59 PM	Main Vac valve closed
10/14/2011	8:39:59 PM	Bubbler valve closed
10/14/2011	8:39:59 PM	Bypass valve opened
10/14/2011	8:39:59 PM	Helium MFC set to  0.000000
10/14/2011	8:39:59 PM	H2 MFC set to  0.000000
10/14/2011	8:39:59 PM	BCl3 MFC set to  0.000000
10/14/2011	8:39:59 PM	PHl3 MFC set to  0.000000
10/14/2011	8:39:59 PM	SiCl4 MFC set to  0.000000
10/14/2011	8:39:59 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	8:39:59 PM	Tube furnace set to 0
10/14/2011	8:40:53 PM	Helium valve closed
10/14/2011	8:40:53 PM	H2 valve closed
10/14/2011	8:40:53 PM	BCl3 valve closed
10/14/2011	8:40:53 PM	PH3 valve closed
10/14/2011	8:40:53 PM	SiCl4 pre valve closed
10/14/2011	8:40:53 PM	SiCl4 post valve closed
10/14/2011	8:40:53 PM	Main Vac valve closed
10/14/2011	8:40:53 PM	Bubbler valve closed
10/14/2011	8:40:53 PM	Bypass valve opened
10/14/2011	8:40:53 PM	Helium MFC set to  0.000000
10/14/2011	8:40:53 PM	H2 MFC set to  0.000000
10/14/2011	8:40:53 PM	BCl3 MFC set to  0.000000
10/14/2011	8:40:53 PM	PHl3 MFC set to  0.000000
10/14/2011	8:40:53 PM	SiCl4 MFC set to  0.000000
10/14/2011	8:40:53 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	8:40:53 PM	Tube furnace set to 0
10/14/2011	8:41:53 PM	Helium valve closed
10/14/2011	8:41:53 PM	H2 valve closed
10/14/2011	8:41:53 PM	BCl3 valve closed
10/14/2011	8:41:53 PM	PH3 valve closed
10/14/2011	8:41:53 PM	SiCl4 pre valve closed
10/14/2011	8:41:53 PM	SiCl4 post valve closed
10/14/2011	8:41:53 PM	Bypass valve closed
10/14/2011	8:41:53 PM	Bubbler valve closed
10/14/2011	8:41:53 PM	Main Vac valve opened
10/14/2011	8:41:53 PM	Helium MFC set to  0.000000
10/14/2011	8:41:53 PM	H2 MFC set to  0.000000
10/14/2011	8:41:53 PM	BCl3 MFC set to  0.000000
10/14/2011	8:41:53 PM	PHl3 MFC set to  0.000000
10/14/2011	8:41:53 PM	SiCl4 MFC set to  0.000000
10/14/2011	8:41:53 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	8:41:53 PM	Tube furnace set to 0
10/14/2011	9:41:53 PM	Run finished at 9:41 PM
10/14/2011	10:44:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	10:44:30 PM	Recipe started at 10:44 PM
10/14/2011	10:44:30 PM	Helium valve closed
10/14/2011	10:44:30 PM	H2 valve closed
10/14/2011	10:44:30 PM	BCl3 valve closed
10/14/2011	10:44:30 PM	PH3 valve closed
10/14/2011	10:44:30 PM	SiCl4 pre valve closed
10/14/2011	10:44:30 PM	SiCl4 post valve closed
10/14/2011	10:44:30 PM	Main Vac valve closed
10/14/2011	10:44:30 PM	Bypass valve closed
10/14/2011	10:44:30 PM	Bubbler valve closed
10/14/2011	10:44:30 PM	Helium MFC set to  0.000000
10/14/2011	10:44:30 PM	H2 MFC set to  0.000000
10/14/2011	10:44:30 PM	BCl3 MFC set to  0.000000
10/14/2011	10:44:30 PM	PHl3 MFC set to  0.000000
10/14/2011	10:44:30 PM	SiCl4 MFC set to  0.000000
10/14/2011	10:44:30 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:44:30 PM	Tube furnace set to 0
10/14/2011	10:44:33 PM	H2 valve closed
10/14/2011	10:44:33 PM	BCl3 valve closed
10/14/2011	10:44:33 PM	PH3 valve closed
10/14/2011	10:44:33 PM	SiCl4 pre valve closed
10/14/2011	10:44:33 PM	SiCl4 post valve closed
10/14/2011	10:44:33 PM	Main Vac valve closed
10/14/2011	10:44:33 PM	Bypass valve closed
10/14/2011	10:44:33 PM	Bubbler valve closed
10/14/2011	10:44:33 PM	Helium valve opened
10/14/2011	10:44:33 PM	Helium MFC set to  500.000000
10/14/2011	10:44:33 PM	H2 MFC set to  0.000000
10/14/2011	10:44:33 PM	BCl3 MFC set to  0.000000
10/14/2011	10:44:33 PM	PHl3 MFC set to  0.000000
10/14/2011	10:44:33 PM	SiCl4 MFC set to  0.000000
10/14/2011	10:44:33 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:44:33 PM	Tube furnace set to 0
10/14/2011	10:45:37 PM	Helium valve closed
10/14/2011	10:45:37 PM	H2 valve closed
10/14/2011	10:45:37 PM	BCl3 valve closed
10/14/2011	10:45:37 PM	PH3 valve closed
10/14/2011	10:45:37 PM	SiCl4 pre valve closed
10/14/2011	10:45:37 PM	SiCl4 post valve closed
10/14/2011	10:45:37 PM	Main Vac valve closed
10/14/2011	10:45:37 PM	Bypass valve closed
10/14/2011	10:45:37 PM	Bubbler valve closed
10/14/2011	10:45:37 PM	Helium MFC set to  0.000000
10/14/2011	10:45:37 PM	H2 MFC set to  0.000000
10/14/2011	10:45:37 PM	BCl3 MFC set to  0.000000
10/14/2011	10:45:37 PM	PHl3 MFC set to  0.000000
10/14/2011	10:45:37 PM	SiCl4 MFC set to  0.000000
10/14/2011	10:45:37 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:45:37 PM	Tube furnace set to 0
10/14/2011	10:45:38 PM	Run finished at 10:45 PM
10/14/2011	10:45:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
10/14/2011	10:58:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
10/14/2011	10:58:02 PM	Recipe started at 10:58 PM
10/14/2011	10:58:02 PM	Helium valve closed
10/14/2011	10:58:02 PM	H2 valve closed
10/14/2011	10:58:02 PM	BCl3 valve closed
10/14/2011	10:58:02 PM	PH3 valve closed
10/14/2011	10:58:02 PM	SiCl4 pre valve closed
10/14/2011	10:58:02 PM	SiCl4 post valve closed
10/14/2011	10:58:02 PM	Main Vac valve closed
10/14/2011	10:58:02 PM	Bubbler valve closed
10/14/2011	10:58:02 PM	Bypass valve opened
10/14/2011	10:58:02 PM	Helium MFC set to  0.000000
10/14/2011	10:58:02 PM	H2 MFC set to  0.000000
10/14/2011	10:58:02 PM	BCl3 MFC set to  0.000000
10/14/2011	10:58:02 PM	PHl3 MFC set to  0.000000
10/14/2011	10:58:02 PM	SiCl4 MFC set to  0.000000
10/14/2011	10:58:02 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:58:02 PM	Tube furnace set to 0
10/14/2011	10:59:15 PM	Helium valve closed
10/14/2011	10:59:15 PM	H2 valve closed
10/14/2011	10:59:15 PM	BCl3 valve closed
10/14/2011	10:59:15 PM	PH3 valve closed
10/14/2011	10:59:15 PM	SiCl4 pre valve closed
10/14/2011	10:59:15 PM	SiCl4 post valve closed
10/14/2011	10:59:15 PM	Main Vac valve closed
10/14/2011	10:59:15 PM	Bubbler valve closed
10/14/2011	10:59:15 PM	Bypass valve opened
10/14/2011	10:59:15 PM	Helium MFC set to  0.000000
10/14/2011	10:59:15 PM	H2 MFC set to  0.000000
10/14/2011	10:59:15 PM	BCl3 MFC set to  0.000000
10/14/2011	10:59:16 PM	PHl3 MFC set to  0.000000
10/14/2011	10:59:16 PM	SiCl4 MFC set to  0.000000
10/14/2011	10:59:16 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	10:59:16 PM	Tube furnace set to 0
10/14/2011	11:00:16 PM	Helium valve closed
10/14/2011	11:00:16 PM	H2 valve closed
10/14/2011	11:00:16 PM	BCl3 valve closed
10/14/2011	11:00:16 PM	PH3 valve closed
10/14/2011	11:00:16 PM	SiCl4 pre valve closed
10/14/2011	11:00:16 PM	SiCl4 post valve closed
10/14/2011	11:00:16 PM	Bypass valve closed
10/14/2011	11:00:16 PM	Bubbler valve closed
10/14/2011	11:00:16 PM	Main Vac valve opened
10/14/2011	11:00:16 PM	Helium MFC set to  0.000000
10/14/2011	11:00:16 PM	H2 MFC set to  0.000000
10/14/2011	11:00:16 PM	BCl3 MFC set to  0.000000
10/14/2011	11:00:16 PM	PHl3 MFC set to  0.000000
10/14/2011	11:00:16 PM	SiCl4 MFC set to  0.000000
10/14/2011	11:00:16 PM	Bypass solenoid MFC set to  0.000000
10/14/2011	11:00:16 PM	Tube furnace set to 0
10/14/2011	11:00:17 PM	Run finished at 11:00 PM
10/14/2011	11:00:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
